ナノディスペンサーによる高精度注入

ナノリットルやピコリットルの分注装置に使用されるドライブは、最大数kHzの高い振動数で動作し、同時に、小さな滴をその後の滴下、噴霧、サテライト形成なく作るのに必要な運動エネルギーを生み出す必要があります。

ピエゾアクチュエータはこの用途に最適です。バルブを直接切り替え、移動のための閉鎖用スプリングや柔軟なチューブに対しても動作することができます。

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製品

PI P-080 Leads
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P-080 PICMA® Stack Multilayer Ring Actuator

with Inner Hole

  • Inner hole for preload or as aperture for optical applications
  • Superior lifetime
  • Ideal for dynamic operation
  • Microsecond response
  • Subnanometer resolution
PI P-088
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P-088 Round PICMA® Stack Multilayer Piezo Actuator

High Blocking Force

  • Superior lifetime
  • Ideal for dynamic operation
  • Flexible, adaptable overall height
  • OEM versions available without stranded wires
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P-882 – P-888 PICMA® Stack Multilayer Piezo Actuators

Ceramic-Insulated High-Power Actuators

  • Superior lifetime
  • High stiffness
  • Microsecond response
  • Subnanometer resolution
  • UHV-compatible to 10-9 hPa
Round PICMA® Chip miniature piezo actuators, lapped end surfaces.
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PD0xx Round PICMA® Chip Actuators

Miniature multilayer piezo actuator with and without inner hole

  • Superior lifetime
  • Ultra-compact: From 5 mm Ø
  • Ideal for dynamic operation
  • Microsecond response
  • Subnanometer resolution
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PL0xx PICMA® Chip Actuators

Miniature Multilayer Piezo Actuators

  • Superior lifetime
  • Ultra-compact: From 2 mm × 2 mm × 2 mm
  • Ideal for dynamic operation
  • Microsecond response
  • Subnanometer resolution
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P-88x.x5 Encapsulated PICMA® Stack Piezo Actuators

For Tough Industrial Environments

  • Splash-resistant full encapsulation
  • Superior lifetime
  • High stiffness
  • Microsecond response
  • Subnanometer resolution
  • UHV-compatible to 10-9 hPa
PI P-601.1S
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P-601 PiezoMove Flexure-Guided Linear Actuator

With Optional Position Sensor

  • Flexure guides for linear motion with minimum tip and tilt
  • Travel ranges to 400 µm
  • Resolution to 0.2 nm
  • Available with integrated position sensor
PI P-602.8SL
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P-602 PiezoMove High-Stiffness Linear Piezo Actuator

With Flexure Guided Motion Amplifier for Travel Ranges to 1 mm

  • Flexure guides for linear motion with minimum tip and tilt
  • Travel ranges to 1 mm
  • Forces to 100 N
  • Stiff and backlash-free construction
  • Available with integrated position sensor
PI P-603
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P-603 Cost-Efficient PiezoMove Linear Flexure Actuator

Frictionless Guidings and Travel Ranges to 0.5 mm

  • Flexure guides for linear motion with minimum tip and tilt
  • Travel ranges to 500 µm
  • Optimized design for manufacturing in large quantities
  • Available with integrated position sensor
PI P-604
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P-604 Compact PiezoMove Linear Actuator

Cost-Efficient, with 300 µm Travel Range

  • Lightweight and compact: 4 g and <13 mm × 20 mm footprint
  • Travel range 300 µm
  • Optimized design for manufacturing in large quantities
  • Customer-specific adaptations can be provided
PI P-810 P-830
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P-810 • P-830 Piezo Actuators

For Light and Medium Loads

  • Outstanding lifetime due to PICMA® piezo actuators
  • Travel range to 60 µm
  • Push forces to 1000 N
  • Pull forces to 5 N
  • Microsecond response
  • Subnanometer resolution
PI P-820
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P-820 Preloaded Piezo Actuators

For Light and Medium Loads

  • Outstanding lifetime due to PICMA® piezo actuators
  • Travel range to 45 µm
  • Push forces to 50 N
  • Pull forces to 10 N
  • Microsecond response, Subnanometer resolution
  • Versions with ball tip
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P-840 • P-841 Preloaded Piezo Actuators

Optional with Integrated Position Sensor

  • Outstanding lifetime due to PICMA® piezo actuators
  • Travel range to 90 µm
  • Compact case
  • Push forces to 1000 N
  • Pull forces to 50 N
  • Microsecond response
  • Subnanometer resolution
  • Versions with ball tip, vacuum versions
PI P-842
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P-842 Preloaded Piezo Actuators

For High Loads and Force Generation

  • Outstanding lifetime due to PICMA® piezo actuators
  • Travel range to 90 µm
  • Push forces to 800 N
  • Pull forces to 300 N
  • Microsecond response
  • Subnanometer resolution
  • Vacuum versions, optional water-resistant case
PI P-842
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P-843 Preloaded Piezo Actuators

For High Loads and Force Generation with Integrated Position Sensors

  • Outstanding lifetime due to PICMA® piezo actuators
  • Travel range to 90 µm
  • Push forces to 800 N
  • Pull forces to 300 N
  • Microsecond response
  • Subnanometer resolution
  • Vacuum versions, optional water-resistant case
PI P-844.60
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P-844 Preloaded Piezo Actuators

For High Loads and Force Generation

  • Outstanding lifetime due to PICMA® piezo actuators
  • Travel range to 90 µm
  • Push forces to 3000 N
  • Pull forces to 700 N
  • Microsecond response
  • Subnanometer resolution
  • Vacuum versions, optional water-resistant case
PI P-844.60
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P-845 Preloaded Piezo Actuators

For High Loads and Force Generation with Integrated Position Sensors

  • Outstanding lifetime due to PICMA® piezo actuators
  • Travel range to 90 µm
  • Push forces to 3000 N
  • Pull forces to 700 N
  • Microsecond response
  • Subnanometer resolution
  • Vacuum versions, optional water-resistant case