E-509 Signal Conditioner / Piezo Servo Module

Servo Controller Module for up to 3 Axes, E-500 Piezo Controller System

  • Position control for piezo positioning systems with SGS, and capacitive sensors
  • Improves Linearity error
  • Eliminates drift and hysteresis
  • Notch filter for higher bandwidth
  • Increases piezo stiffness
  • Excellent linearity thanks to integrated linearization function (ILS)
E-509 Signal Conditioner / Piezo Servo Module
製品の解説 仕様 ダウンロード 見積 / 発注

Position control module with sensor evaluation electronics

The E-509 is a position control module with sensor evaluation electronics for nanopositioning systems with integrated position sensors. It automatically eliminates drift or hysteresis occurring during voltage-controlled piezo operation, and compensates changes in the position of the piezo actuator position when the piezo voltage is adjusted immediately after a change of load.

Nanometer-precision piezo positioning

Proportional-integral position control of the E-509 servo controller module is optimized for piezo operation. The proportional and integral term as well as the control bandwidth can be adjusted individually. The integrated notch filters (can be set for each axis) improve the stability and allow wider -bandwidth operation closer to the mechanical resonant frequency of the piezo system. Depending on the piezo mechanics and the sensor type, positioning accuracy and repeatability is therefore possible in the nanometer range.

The E-509.E03 model for signal evaluation and E-509.E3 model as servo controller module are available for the high-resolution capacitive single-plate sensors in the PISeca series.

Specifications

データシート

Datasheet E-509 (英語)

日付 / バージョン
2018-02-13
pdf - 111 KB
日付 / バージョン
2018-02-13
pdf - 112 KB
日付 / バージョン
2018-03-29
pdf - 488 KB

Downloads

データシート

データシート

Datasheet E-509 (英語)

日付 / バージョン
2018-02-13
pdf - 111 KB
日付 / バージョン
2018-02-13
pdf - 112 KB
日付 / バージョン
2018-03-29
pdf - 488 KB

ドキュメント

ドキュメント

User Manual PZ62 (英語)

E-500 / E-501 Series Modular Piezo Controller: Chassis with power supply, amplifier modules (E-503, E-504, E-505, E-506, E-508), sensor and servo-control module (E-509), display and interface modules (E-515, E-517).

日付 / バージョン
2013-07-11
pdf - 2 MB
英語
ドキュメント

User Manual PZ77 (英語)

E-509 Sensor / Piezo Servo-Control Module

日付 / バージョン
2009-02-20
pdf - 1 MB
英語

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

お問い合わせ

担当者よりお問合せにつきまして、すぐにご連絡をさせて頂きます。

Compatible Products Compatible Accessories Related Controllers