NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 10 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
N-310 NEXACT® OEM Miniature Linear Motor / Actuator
Compact, Fast, with Long Travel Range, PiezoWalk® Principle
- Travel range 10 to 125 mm, variable runner lengths
- Compact in size, inexpensive design
- Resolution to 0.03 nm
- Push force up to 10 N
Application fields
- Industrial precision positioning
- Semiconductor technology
- Semiconductor tests
- Wafer inspection
- Lithography
- Nanoimprinting
- Nanometrology
Nanometer precision and high feed force with PiezoWalk® walking drives
In the PiezoWalk® walking drive, several piezo actuators do a walking motion that leads to a forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Specifications
Specifications
Motion | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
---|---|---|---|---|---|---|---|
Active axes | X | X | X | X | X | X | |
Travel range in X | 10 mm | 20 mm | 50 mm | 75 mm | 100 mm | 125 mm | |
Travel range in X (analog mode) | 10 µm | 10 µm | 10 µm | 10 µm | 10 µm | 10 µm | max. |
Maximum velocity in X, unloaded | 10 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | |
Positioning | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
Step size in full step mode | 10 µm | 10 µm | 10 µm | 10 µm | 10 µm | 10 µm | |
Resolution in X, open loop | 0.03 nm | 0.03 nm | 0.03 nm | 0.03 nm | 0.03 nm | 0.03 nm | typ. |
Drive Properties | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
Drive type | NEXACT® piezo walking drive | NEXACT® piezo walking drive | NEXACT® piezo walking drive | NEXACT® piezo walking drive | NEXACT® piezo walking drive | NEXACT® piezo walking drive | |
Operating voltage | -10 to +45 V | -10 to +45 V | -10 to +45 V | -10 to +45 V | -10 to +45 V | -10 to +45 V | |
Drive force in positive direction of motion in X | 10 N | 10 N | 10 N | 10 N | 10 N | 10 N | max. |
Drive force in negative direction of motion in X | 10 N | 10 N | 10 N | 10 N | 10 N | 10 N | max. |
Mechanical Properties | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
Holding force in X, passive | 12 N | 12 N | 12 N | 12 N | 12 N | 12 N | max. |
Overall mass | 50 g | 50 g | 50 g | 50 g | 50 g | 50 g | ±5 % |
Material | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | |
Miscellaneous | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
Operating temperature range | 0 to 50 °C | 0 to 50 °C | 0 to 50 °C | 0 to 50 °C | 0 to 50 °C | 0 to 50 °C | |
Connector | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | |
Cable length | 1.5 m | 1.5 m | 1.5 m | 1.5 m | 1.5 m | 1.5 m | ±10 mm |
Recommended controllers / drivers | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 |
Maximum velocity in X, unloaded: Depending on the drive electronics.
Resolution in X, open loop: Depending on the drive electronics.
Recommended controllers / drivers:
E-712 - Modular, high performance for highest precision and velocity
E-861 - Cost effective NEXACT® controller for 1 channel
E-861.11C885 - NEXACT® controller module for modular controller system C-885
E-862 - Cost effective open-loop driver
Downloads
製品についての注意事項
Product Change Notification N-310.XX-N-47X.XX
データシート
ドキュメント
User Manual N310T0012
N-310 NEXACT® OEM Miniature Linear Drive
3D モデル
N-310 3-D model
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 20 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 50 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 75 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 100 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 125 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
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テクノロジー
PiezoWalk® ステッピングドライブ
PiezoWalk® ドライブは、高い信頼性、高い位置分解能、長期安定性が要求される半導体業界向けに10年程前に開発されました。
真空
慎重な取り扱いと確かな根拠: PIは、原材料やコンポーネント、最終製品の品質保証に必要な設備だけでなく、長年にわたる高真空および超高真空ポジショニングシステムに関する経験を有しています。
インクリメンタルセンサ
PI社では、約1mmから始まる長いトラベルレンジを測定するインクリメンタル測定システムを採用しています。これらのセンサは、ほとんどの場合光学センサですが、ピコメートルレンジまでの位置分解能を実現します。
多軸位置決めシステム
ヘキサポッドプラットフォームは、搭載物の6軸方向、つまり3つの直動軸と3つの回転軸に沿った高精度位置決め、および搭載物の位置調整のために使用されます。