N-310.10
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 10 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
N-310 NEXACT® OEM Miniature Linear Motor / Actuator
Compact, Fast, with Long Travel Range, PiezoWalk® Principle
- Travel range 10 to 125 mm, variable runner lengths
- Compact in size, inexpensive design
- Resolution to 0.03 nm
- Push force up to 10 N
N-310, dimensions in mm. Runner length L = travel range + 40 mm.
N-310 NEXACT® OEM Miniature Linear Motor / Actuator
製品の解説
仕様
ダウンロード
見積 / 発注
Application fields
- Industrial precision positioning
- Semiconductor technology
- Semiconductor tests
- Wafer inspection
- Lithography
- Nanoimprinting
- Nanometrology
Nanometer precision and high feed force with PiezoWalk® walking drives
In the PiezoWalk® walking drive, several piezo actuators do a walking motion that leads to a forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Specifications
Specifications
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| Motion | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
|---|---|---|---|---|---|---|---|
| Active axes | X | X | X | X | X | X | |
| Travel range in X | 10 mm | 20 mm | 50 mm | 75 mm | 100 mm | 125 mm | |
| Travel range in X (analog mode) | 10 µm | 10 µm | 10 µm | 10 µm | 10 µm | 10 µm | max. |
| Maximum velocity in X, unloaded | 10 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | |
| Positioning | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
| Step size in full step mode | 10 µm | 10 µm | 10 µm | 10 µm | 10 µm | 10 µm | |
| Resolution in X, open loop | 0.03 nm | 0.03 nm | 0.03 nm | 0.03 nm | 0.03 nm | 0.03 nm | typ. |
| Drive Properties | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
| Drive type | NEXACT® piezo walking drive | NEXACT® piezo walking drive | NEXACT® piezo walking drive | NEXACT® piezo walking drive | NEXACT® piezo walking drive | NEXACT® piezo walking drive | |
| Operating voltage | -10 to +45 V | -10 to +45 V | -10 to +45 V | -10 to +45 V | -10 to +45 V | -10 to +45 V | |
| Drive force in positive direction of motion in X | 10 N | 10 N | 10 N | 10 N | 10 N | 10 N | max. |
| Drive force in negative direction of motion in X | 10 N | 10 N | 10 N | 10 N | 10 N | 10 N | max. |
| Mechanical Properties | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
| Holding force in X, passive | 12 N | 12 N | 12 N | 12 N | 12 N | 12 N | max. |
| Overall mass | 50 g | 50 g | 50 g | 50 g | 50 g | 50 g | ±5 % |
| Material | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | |
| Miscellaneous | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
| Operating temperature range | 0 to 50 °C | 0 to 50 °C | 0 to 50 °C | 0 to 50 °C | 0 to 50 °C | 0 to 50 °C | |
| Connector | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | |
| Cable length | 1.5 m | 1.5 m | 1.5 m | 1.5 m | 1.5 m | 1.5 m | ±10 mm |
| Recommended controllers / drivers | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 |
Maximum velocity in X, unloaded: Depending on the drive electronics.
Resolution in X, open loop: Depending on the drive electronics.
Recommended controllers / drivers:
E-712 - Modular, high performance for highest precision and velocity
E-861 - Cost effective NEXACT® controller for 1 channel
E-861.11C885 - NEXACT® controller module for modular controller system C-885
E-862 - Cost effective open-loop driver
Downloads
製品についての注意事項
製品についての注意事項
Product Change Notification N-310.XX-N-47X.XX
日付 / バージョン
2023-01-23
pdf - 86 KB
データシート
ドキュメント
ドキュメント
User Manual N310T0012
N-310 NEXACT® OEM Miniature Linear Drive
日付 / バージョン
2021-03-09
pdf - 896 KB
英語
３D モデル
３D モデル
N-310 3-D model
zip - 682 KB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
N-310.11
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 20 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
N-310.13
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 50 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
N-310.14
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 75 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
N-310.15
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 100 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
N-310.16
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 125 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
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