Q-522 Q-Motion® Miniature Linear Stage

Q-522 Q-Motion® Miniature Linear Stage
製品について 仕様 ダウンロード 見積 / 発注
  • Only 22 mm in width and 10 mm in height
  • Direct position measurement with incremental encoder with up to 1 nm resolution
  • Minimum incremental motion up to 2 nm
  • XY mounting without adapter
  • Q-622 rotation stage mountable without adapter
  • Suitable for vacuum to 10-6 hPa, versions to 10-9 hPa available

Piezoelectric inertia drive

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 10 mm/s.

Direct-measuring principle

Versions with noncontact optical linear encoder available. Resolution 4 nm or 1 nm, depending on the version. Versions with encoder have a reference point switch

Vacuum and nonmagnetic environments

All Q-Motion® linear stages are suitable for operation in high vacuum to 10-6 hPa. Furthermore, ultrahigh vacuum variants are also available for 10-9hPa. Nonmagnetic versions are available on request

Application fields

Microassembly, Photonics, Optical alignment, Microscopy, Beamline instrumentation, Semiconductor technology, Testing

Specifications

Datasheet Q-522

バージョン/日付
2018-05-02
バージョン/日付
2018-05-02
バージョン/日付
2018-06-22
ドキュメントの言語

Downloads

データシート

Datasheet Q-522

バージョン/日付
2018-05-02
バージョン/日付
2018-05-02
バージョン/日付
2018-06-22
ドキュメントの言語

ドキュメント

User Manual MP134 (英語)

Q-522 Q-Motion Miniature Linear Stage, Piezoelectric Inertia Drive
バージョン/日付
2015-02-24
バージョン/日付
2015-02-24
ドキュメントの言語

Short Instructions MP139EK

Q-5xx, Q-6xx PIShift Stages
バージョン/日付
3.1.0 2018-06-19

3D モデル

Q-522 3-D model

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly

Q-522.000
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 6.5 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 22 × 22 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-522.00U
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 6.5 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 22 × 22 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa
Q-522.030
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 6.5 mm travel range, Linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 32 × 22 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-522.040
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 6.5 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 32 × 22 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-522.04U
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 6.5 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 32 × 22 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa
Q-522.100
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 13 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 22 × 32 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-522.10U
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 13 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 22 × 32 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa
Q-522.130
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 13 mm travel range, Linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 32 × 32 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-522.140
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 13 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 32 × 32 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-522.14U
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 13 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 32 × 32 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa
Q-522.200
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 26 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 22 × 42 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-522.20U
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 26 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 22 × 42 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa
Q-522.230
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 26 mm travel range, Linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 32 × 42 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-522.240
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 26 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 32 × 42 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-522.24U
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 26 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 32 × 42 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa