N-565 Linear Stage with the Highest Precision

NEXACT® Piezo Stepping Drive with Subnanometer Encoder Resolution

N-565 Linear Stage with the Highest Precision
製品の解説 仕様 ダウンロード 見積 / 発注
  • Ultraprecision: 3 nm minimum incremental motion and direct-measuring PIOne encoder with 0.5 nm resolution
  • Long travel ranges: 13 mm, 26 mm or 52 mm
  • Self-locking when switched off: Saves energy and reduces generation of heat
  • Long lifetime and high reliability due to PiezoWalk® technology
  • Compact design: 65 mm width, 20 mm height

NEXACT® reference-class linear stage

Linear stage with NEXACT® PiezoWalk® drives allow high-precision positioning in the nanometer range over long travel ranges. They are equipped with direct-measuring linear encoders and crossed roller bearings for the highest accuracy.

PiezoWalk® technology: High resolution and low wear

The PiezoWalk® technology combines the technological advantages of piezo actuators with those of piezomotors. PiezoWalk® walking drives offer not only subnanometer resolution, high forces, and high stiffness but allow theoretically unlimited travel ranges. In contrast to other piezo-motorized drive principles, PiezoWalk® walking drives are not subject to sliding friction effects. They are based on stiction contacts of several piezo actuators that step along a runner. At rest, PiezoWalk® walking drives are self-locking, consume no energy, and do not generate heat.

Direct position measuring with PIOne linear encoder

The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured value, allows a position resolution of much less than one nanometer. In addition, due to the short signal period and the high quality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a reference signal.

Application fields

Sample manipulation, sample positioning, optics or mechanical components with high precision and stability, precision mechanics in the semiconductor industry, micromanipulation, microscopy, automation, applications in confined spaces, applications in nonmagnetic environments.

Specifications

Datasheet

Datasheet N-565

日付 / バージョン
2021-02-22
日付 / バージョン
2021-02-22
日付 / バージョン
2019-10-17
ドキュメントの言語

Downloads

Product Note

Product Note

Product Change Notification Motor Driven Products

日付 / バージョン
2021-04-19
ドキュメントの言語 英語

Datasheet

Datasheet

Datasheet N-565

日付 / バージョン
2021-02-22
日付 / バージョン
2021-02-22
日付 / バージョン
2019-10-17
ドキュメントの言語

Documentation

Documentation

User Manual MP148

N-565 NEXACT® Linear Stage
日付 / バージョン
1.5.0 2021-02-23
日付 / バージョン
1.5.0 2021-02-23
ドキュメントの言語
ダウンロードリクエストのリンク
Documentation

Short Instructions MP137EK

NEXACT® Positioners: N-524, N-565, N-765
日付 / バージョン
3.0.0 2019-12-18
日付 / バージョン
3.0.0 2019-12-18
ドキュメントの言語

3-D Models

3-D Models

N-565 3-D model

ダウンロードリクエストのリンク

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly

N-565.160
Precision linear stage, 13 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 80 × 20 mm (W × L × H), NEXACT® piezoelectric walking drive
N-565.260
Precision linear stage, 26 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 110 × 20 mm (W × L × H), NEXACT® piezoelectric walking drive
N-565.360
Precision linear stage, 52 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 160 × 20 mm (W × L × H), NEXACT® piezoelectric walking drive