Q-521 Q‑Motion® Miniature Linear Stage

Smallest Linear Stage with Position Control, High Resolution and Affordable Price

  • Only 21 mm in width and 10 mm in height
  • Direct position measurement with integrated incremental encoder
  • Encoder resolution up to 1 nm
  • Minimum incremental motion down to 30 nm
  • Multi-axis system setups with adapter plate or bracket (available as an option)
Q-521 Q‑Motion® Miniature Linear Stage
製品の解説 仕様 ダウンロード 見積 / 発注

Piezoelectric inertia drive

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special drive electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. The drives acting directly on the runner achieve velocities of max. 6 mm/s with an operating frequency of up to 20 kHz.

Direct-measuring principle

The linear stages are equipped with a noncontact measuring optical linear encoder and a reference switch. Resolution 4 nm or 1 nm, depending on the version.

Application fields

Microassembly. Photonics. Optical alignment. Microscopy. Beamline instrumentation. Semiconductor technology. Testing applications.

Specifications

データシート

Datasheet Q-521

日付 / バージョン
2023-01-26
pdf - 841 KB
日付 / バージョン
2023-01-26
pdf - 841 KB
日付 / バージョン
2021-01-14
pdf - 621 KB

Downloads

製品についての注意事項

製品についての注意事項

Product Change Notification Q-xxx; N-765

日付 / バージョン
2019-03-26
pdf - 435 KB

データシート

データシート

Datasheet Q-521

日付 / バージョン
2023-01-26
pdf - 841 KB
日付 / バージョン
2023-01-26
pdf - 841 KB
日付 / バージョン
2021-01-14
pdf - 621 KB

ドキュメント

ドキュメント

Short Instructions MP139EK

Q-Motion® Positioners: Q-5xx, Q-6xx

日付 / バージョン
4.3.0 03/2024
pdf - 626 KB
日付 / バージョン
4.3.0 03/2024
pdf - 661 KB
ドキュメント

User Manual MP145

Q-521 Q-Motion Miniature Linear Positioning Stage, Piezoelectric Inertia Drive

日付 / バージョン
1.1.2 2020-07-29
pdf - 2 MB
日付 / バージョン
1.1.2 2020-07-29
pdf - 2 MB

3D モデル

3D モデル

Q-521 3-D model

zip - 2 MB

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

Q-521.130

Q-Motion® miniature linear stage, piezoelectric inertia drive, 12 mm travel range, linear encoder, 4 nm resolution, 0.6 N drive force, dimensions 21 × 30 × 10 mm (W × L × H)

Q-521.140

Q-Motion® miniature linear stage, piezoelectric inertia drive, 12 mm travel range, linear encoder, 1 nm resolution, 0.6 N drive force, dimensions 21 × 30 × 10 mm (W × L × H)

Q-521.230

Q-Motion® miniature linear stage, piezoelectric inertia drive, 22 mm travel range, linear encoder, 4 nm resolution, 0.6 N drive force, dimensions 21 × 32 × 10 mm (W × L × H)

Q-521.240

Q-Motion® miniature linear stage, piezoelectric inertia drive, 22 mm travel range, linear encoder, 1 nm resolution, 0.6 N drive force, dimensions 21 × 32 × 10 mm (W × L × H)

Q-521.330

Q-Motion® miniature linear stage, piezoelectric inertia drive, 32 mm travel range, linear encoder, 4 nm resolution, 0.6 N drive force, dimensions 21 × 42 × 10 mm (W × L × H)

Q-521.340

Q-Motion® miniature linear stage, piezoelectric inertia drive, 32 mm travel range, linear encoder, 1 nm resolution, 0.6 N drive force, dimensions 21 × 42 × 10 mm (W × L × H)

お問い合わせ

担当者よりお問合せにつきまして、すぐにご連絡をさせて頂きます。

Compatible Electronics Compatible Accessories Related Products

Technology