Q-545 Q-Motion® Precision Linear Stage

High Forces and Small Design Due to Piezo Motors

Q-545 Q-Motion® Precision Linear Stage
製品について 仕様 ダウンロード 見積 / 発注
  • Only 45 mm in width
  • Push/pull force 8 N
  • Incremental sensors with position resolution
  • XY combinations without adapter plate possible
  • Vacuum-compatible to 10-6 hPa (Q-545.xx0)
  • Vacuum-compatible to 10-9 hPa (Q-545.xxU)

Piezoelectric inertia drive

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 10 mm/s.

Direct-measuring principle

Versions with noncontact optical linear encoder available. Resolution 1 nm. Versions with encoder have a reference point switch

Vacuum and nonmagnetic environments

All Q-Motion® linear stages are suitable for operation in high vacuum to 10-6 hPa. Furthermore, ultrahigh vacuum variants are available for 10-9 hPa. Nonmagnetic versions are available on request

Application fields

Microassembly, Photonics, Optical alignment, Microscopy, Beamline instrumentation, Semiconductor technology, Testing

Specifications

Datasheet Q-545

バージョン/日付
2018-05-02
バージョン/日付
2018-05-02
バージョン/日付
2018-06-22
ドキュメントの言語

Downloads

Datasheet

Datasheet Q-545

バージョン/日付
2018-05-02
バージョン/日付
2018-05-02
バージョン/日付
2018-06-22
ドキュメントの言語

Documentation

Short Instructions MP139EK

Q-5xx, Q-6xx PIShift Stages
バージョン/日付
3.1.0 2018-06-19

User Manual MP135

Q-545 Linear Stage, Piezoelectric Inertia Drive
バージョン/日付
2015-07-10
バージョン/日付
2015-07-10
ドキュメントの言語

3-D Models

Q-545 3-D model

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly

Q-545.100
Q-Motion® linear stage, piezoelectric inertia drive, 13 mm travel range, without position sensor for open-loop operation, 8 N push/pull force, dimensions 45 × 48 × 15 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-545.10U
Q-Motion® linear stage, piezoelectric inertia drive, 13 mm travel range, without position sensor for open-loop operation, 8 N push/pull force, dimensions 45 × 48 × 15 mm (W × L × H), vacuum compatible to 10-9 hPa
Q-545.140
Q-Motion® linear stage, piezoelectric inertia drive, 13 mm travel range, Linear encoder, 1 nm resolution, 8 N push/pull force, dimensions 45 × 48 × 15 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-545.14U
Q-Motion® linear stage, piezoelectric inertia drive, 13 mm travel range, Linear encoder, 1 nm resolution, 8 N push/pull force, dimensions 45 × 48 × 15 mm (W × L × H), vacuum compatible to 10-9 hPa
Q-545.200
Q-Motion® linear stage, piezoelectric inertia drive, 26 mm travel range, without position sensor for open-loop operation, 8 N push/pull force, dimensions 45 × 63 × 15 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-545.20U
Q-Motion® linear stage, piezoelectric inertia drive, 26 mm travel range, without position sensor for open-loop operation, 8 N push/pull force, dimensions 45 × 63 × 15 mm (W × L × H), vacuum compatible to 10-9 hPa
Q-545.240
Q-Motion® linear stage, piezoelectric inertia drive, 26 mm travel range, Linear encoder, 1 nm resolution, 8 N push/pull force, dimensions 45 × 63 × 15 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-545.24U
Q-Motion® linear stage, piezoelectric inertia drive, 26 mm travel range, Linear encoder, 1 nm resolution, 8 N push/pull force, dimensions 45 × 63 × 15 mm (W × L × H), vacuum compatible to 10-9 hPa

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