LMS-180 Precision Linear Stage

High Dynamics due to Magnetic Direct Drive, Excellent Travel Accuracy

LMS-180 Precision Linear Stage
製品の解説 仕様 ダウンロード 見積 / 発注
  • Travel ranges to 508 mm (20")
  • Velocity to 500 mm/s
  • Incremental encoder with 15 nm resolution

Reference-class linear stage

High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).

Multi-axis combinations with the directly driven rotation stages of the UPR series.

Versions with DC servo or stepper motors are available with the same footprint.

 

Magnetic direct drive

Ironless magnetic direct drive for high velocity and acceleration. High position resolution.

Fields of application

Industry and research. Metrology, precision scanning in semiconductor or electronics manufacturing.

Specifications

Datasheet

Datasheet LMS-180

日付 / バージョン
2017-04-19
日付 / バージョン
2017-04-19
日付 / バージョン
2017-08-08
ドキュメントの言語

Downloads

Datasheet

Datasheet

Datasheet LMS-180

日付 / バージョン
2017-04-19
日付 / バージョン
2017-04-19
日付 / バージョン
2017-08-08
ドキュメントの言語

Documentation

Documentation

User Manual LMS-180

Precision Linear Stage
日付 / バージョン
MAN_LMS-180_9_EN_01.PDF
日付 / バージョン
2017-04-21
ドキュメントの言語

3-D Models

3-D Models

LMS-180 3-D model

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