Precision-class Z stage
High guiding accuracy and stiffness due to ball screws and crossed roller guides. Stress-relieved aluminum base for high stability. 2-phase stepper motor for high torque even at low velocities and high resolution Noncontact limit and reference switches (Hall effect). Reference switch with direction sensing in the middle of the travel range. Integrated linear encoder, installed centrically.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Reduced outgassing especially for use in vacuum environments
Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. This allows a bakeout temperature of up to 80° C. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6 hPa.
Application fields
Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.
| Motion | L-310.021211V6 | Tolerance |
|---|---|---|
| Active axes | Z | |
| Travel range in Z | 26 mm | |
| Maximum velocity in Z, unloaded | 7.5 mm/s | |
| Flatness (Linear crosstalk in X with motion in Z) | ± 3 µm | typ. |
| Straightness (Linear crosstalk in Y with motion in Z) | ± 3 µm | typ. |
| Yaw (Rotational crosstalk in θX with motion in Z) | ± 150 µrad | typ. |
| Pitch (Rotational crosstalk in θY with motion in Z) | ± 150 µrad | typ. |
| Positioning | L-310.021211V6 | Tolerance |
| Integrated sensor | Incremental linear encoder | |
| Unidirectional repeatability in Z | 0.1 µm | typ. |
| Bidirectional repeatability in Z | ± 0.2 µm | typ. |
| Minimum incremental motion in Z | 0.05 µm | typ. |
| Sensor signal | Sin/cos, 1 V peak-peak | |
| Sensor signal period | 20 µm | |
| Reference switch | Hall effect, N/C contact, 5 V, NPN | |
| Reference switch repeatability | 2 µm | |
| Limit switches | Hall effect, N/C contact, 5 V, NPN | |
| Drive Properties | L-310.021211V6 | Tolerance |
| Drive type | 2-phase stepper motor | |
| Motor resolution | 200 Full steps/rev. | |
| Nominal voltage | 24 V | |
| Peak voltage | 48 V | |
| Drive force in negative direction of motion in Z | 55 N | typ. |
| Drive force in positive direction of motion in Z | 55 N | typ. |
| Mechanical Properties | L-310.021211V6 | Tolerance |
| Guide | Crossed roller guide | |
| Drive screw type | Ball screw | |
| Drive screw pitch | 1 mm | |
| Holding force in Z, passive | 50 N | |
| Moved mass in Z, unloaded | 900 g | |
| Permissible push force in X | 100 N | max. |
| Permissible push force in Y | 50 N | max. |
| Permissible push force in Z | 55 N | max. |
| Permissible torque in θx | 40 N·m | max. |
| Permissible torque in θY | 80 N·m | max. |
| Permissible torque in θZ | 80 N·m | max. |
| Overall mass | 2600 g | |
| Material | Anodized aluminum | |
| Miscellaneous | L-310.021211V6 | Tolerance |
| Connector | HD D-sub 26-pin (m) | |
| Sensor connector | D-sub 9-pin (m) | |
| Vacuum class | 10⁻⁶ hPa | |
| Recommended controllers / drivers | C-663.12 C-885 with C-663.12C885 ACS modular controller | |
| Operating temperature range | 5 to 40 °C |
L-310.021211V6
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Vacuum compatible precision Z stage; 2-phase stepper motor; 26 mm travel range; 55 N load capacity; 7.5 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak; vacuum compatible to 10-6 hPa
