P-620.Z - P-622.Z PIHera Vertical Precision Positioner

Variable Travel Ranges and Axis Configuration

  • Travel ranges 50 µm to 250 µm (350 µm open loop)
  • Resolution to 0.1 nm
  • Linearity error only 0.02 %
  • Direct position measuring with capacitive sensors
  • X, XY, Z, XYZ versions
P-620.Z - P-622.Z PIHera Vertical Precision Positioner
製品の解説 仕様 ダウンロード 見積 / 発注

Application fields

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test applications
  • Semiconductor technology

Outstanding lifetime due to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

Specifications

Datasheet

Datasheet P-620.Z – P-622.Z

日付 / バージョン
2021-11-11
pdf - 371 KB
日付 / バージョン
2021-11-11
pdf - 373 KB
日付 / バージョン
2018-06-13
pdf - 747 KB

Downloads

Product Note

Product Note

Product Change Notification Piezo Actuator Driven Products

日付 / バージョン
2021-04-19
pdf - 377 KB

Datasheet

Datasheet

Datasheet P-620.Z – P-622.Z

日付 / バージョン
2021-11-11
pdf - 371 KB
日付 / バージョン
2021-11-11
pdf - 373 KB
日付 / バージョン
2018-06-13
pdf - 747 KB

Documentation

Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

日付 / バージョン
6.1.0 10/2019
pdf - 1 MB
日付 / バージョン
6.1.0 10/2019
pdf - 1 MB
Documentation

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors

日付 / バージョン
1.3.0 2021-11-03
pdf - 3 MB
日付 / バージョン
1.3.0 2021-11-03
pdf - 3 MB

3-D Models

3-D Models

P-62x.Z 3-D model

zip - 327 KB

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