Piezo phase shifter, 3 µm, without sensor
- Resonant frequency 25 kHz for the highest dynamics
- Travel range of up to 3 µm
- Compact dimensions: Ø 30 mm × 10 mm
- Open-loop versions with aperture
- Invar option for the highest thermal stability
- (Fizeau) interferometry
- Optical nanomanipulation and inspection
- Scanning microscopy
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
Product Change Notification Piezo Actuator Driven Products
User Manual PZ301
S-303 Piezo Phase Shifter
Short Instructions PZ277
Piezo Tip/Tilt Platforms: S-3xx
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