S-303.0L
Piezo phase shifter, 3 µm, without sensor
S-303 Piezo Phase Shifters
High Dynamics, Nanometer-Precision Piezo Phase Shifters
- Resonant frequency 25 kHz for the highest dynamics
- Travel range of up to 3 µm
- Compact dimensions: Ø 30 mm × 10 mm
- Open-loop versions with aperture
- Invar option for the highest thermal stability
A 250-picometer step (0.25 nm) of the S-303 platform, controlled by an E-503 amplifier module and an E-509.C1A servo controller module. Measured with a special ultrahigh-resolution, capacitive measuring device, ±0.02 nm resolution.
S-303.CD / .CDi, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
S-303.0L / .0Li, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
S-303 Piezo Phase Shifters
製品の解説
仕様
ダウンロード
見積 / 発注
Application fields
- (Fizeau) interferometry
- Optical nanomanipulation and inspection
- Scanning microscopy
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
Specifications
Specifications
| Motion | S-303.0L | S-303.CD | S-303.0LI | S-303.CDI | Tolerance |
|---|---|---|---|---|---|
| Active axes | Z | Z | Z | Z | |
| Travel range in Z, open loop | 3 µm | 3 µm | 3 µm | 3 µm | ±20% |
| Travel range in Z | 2 µm | 2 µm | |||
| Linearity error in Z | 1 % | 1 % | typ. | ||
| Positioning | S-303.0L | S-303.CD | S-303.0LI | S-303.CDI | Tolerance |
| Resolution in Z, open loop | 0.03 nm | 0.03 nm | 0.03 nm | 0.03 nm | typ. |
| Bidirectional repeatability in Z, 10% travel range | ± 1.4 nm | ± 1.4 nm | ± 1.4 nm | ± 1.4 nm | typ. |
| System resolution in Z | 0.03 nm | 0.03 nm | |||
| Integrated sensor | Capacitive, direct position measuring | Capacitive, direct position measuring | |||
| Drive Properties | S-303.0L | S-303.CD | S-303.0LI | S-303.CDI | Tolerance |
| Drive type | PICMA® | PICMA® | PICMA® | PICMA® | |
| Operating voltage | -20 to 120 V | -20 to 120 V | -20 to 120 V | -20 to 120 V | |
| Electrical capacitance in Z | 0.9 µF | 0.9 µF | 0.9 µF | 0.9 µF | ±20% |
| Mechanical Properties | S-303.0L | S-303.CD | S-303.0LI | S-303.CDI | Tolerance |
| Guide | Flexure guide with lever amplification | Flexure guide with lever amplification | Flexure guide with lever amplification | Flexure guide with lever amplification | |
| Stiffness in Z | 400 N/µm | 400 N/µm | 400 N/µm | 400 N/µm | ±20% |
| Resonant frequency in Z, unloaded | 25000 Hz | 25000 Hz | 25000 Hz | 25000 Hz | ±20% |
| Permissible push force in Z | 0.5 N | 0.5 N | 0.5 N | 0.5 N | max. |
| Permissible pull force in Z | 0.5 N | 0.5 N | 0.5 N | 0.5 N | max. |
| Permissible torque in θZ | 0.1 N·m | 0.1 N·m | 0.1 N·m | 0.1 N·m | max. |
| Overall mass | 30 g | 100 g | 30 g | 100 g | |
| Material | Aluminum | Aluminum | Invar | Invar | |
| Miscellaneous | S-303.0L | S-303.CD | S-303.0LI | S-303.CDI | Tolerance |
| Connector | LEMO FFS.00.250.CTCE24 | D-sub 7W2 (m) | LEMO FFS.00.250.CTCE24 | D-sub 7W2 (m) | |
| Recommended controllers / drivers | E-503, E-505, E-610, E-621, E-625, E-663, E-665, E-709, E-709.CHG, E-754 | E-503, E-505, E-610, E-621, E-625, E-663, E-665, E-709, E-709.CHG, E-754 | E-503, E-505, E-610, E-621, E-625, E-663, E-665, E-709, E-709.CHG, E-754 | E-503, E-505, E-610, E-621, E-625, E-663, E-665, E-709, E-709.CHG, E-754 | |
| Cable length | 1.5 m | 1.5 m | 1.5 m | 1.5 m | |
| Operating temperature range | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | |
| Sensor connector | D-Sub 7W2 (m) | D-Sub 7W2 (m) |
Downloads
Product Note
Product Note
Product Change Notification Piezo Actuator Driven Products
日付 / バージョン
2021-04-19
pdf - 377 KB
英語
Datasheet
Documentation
3-D Models
3-D Models
3-D-model S-303.xxI
zip - 63 KB
3-D Models
3-D-model S-303.CD
zip - 44 KB
3-D Models
3-D-model S-303.xL
zip - 356 KB
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly
S-303.CD
Piezo phase shifter, 3 µm, capacitive sensor
S-303.0LI
Piezo phase shifter, 3 µm, without sensor, Invar
S-303.CDI
Piezo phase shifter, 3 µm, capacitive sensor, Invar
