S-303 Piezo Phase Shifters

High Dynamics, Nanometer-Precision Piezo Phase Shifters

S-303 Piezo Phase Shifters
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Fields of application

  • (Fizeau) interferometry
  • Optical nanomanipulation and inspection
  • Scanning microscopy

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Specifications

Datasheet S-303

日付 / バージョン
2018-08-15
日付 / バージョン
2018-08-15
ドキュメントの言語

Downloads

Datasheet

Datasheet S-303

日付 / バージョン
2018-08-15
日付 / バージョン
2018-08-15
ドキュメントの言語

Documentation

Short Instructions PZ277EK

S-3xx Piezo Tip/Tilt Platforms
日付 / バージョン
1.0.0 November 2017

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