P-628KHFS Long-Travel XY Piezo Stage with Nanometer Flatness

Active Z-Axis Design Provides Real-Time Runout Compensation

P-628KHFS Long-Travel XY Piezo Stage with Nanometer Flatness
製品について 仕様 ダウンロード 見積 / 発注
  • Closed-loop travel range 800 µm × 800 µm (to 1500 µm possible)
  • Flatness of travel <1 nm
  • High-precision, cost-efficient
  • Resolution to 0.1 nm
  • Positioning accuracy 0.02 %
  • Frictionless, high-precision flexure guiding system
  • Outstanding lifetime due to PICMA® piezo actuators

Specifications

Datasheet P-628KHFS

ドキュメントの言語

Downloads

Datasheet

Datasheet P-628KHFS

ドキュメントの言語

Documentation

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
バージョン/日付
1.1.0 2018-08-07
バージョン/日付
1.1.0 2018-08-07
ドキュメントの言語

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P-628KHFS

Long-Range XY Nanopositioning System, 800 µm × 800 µm, PicoPlane High-Flatness Option

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