P-915KWEF Piezo Hexapod

Load capacity up to 1500 g
Min. incremental motion 1 nm / 0.07 µrad
Travel ranges to 70 µm
Capacitive sensors for dynamic scanning and precision positioning

Highly dynamic reference-class 6-axis positioning system

Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction.

Piezo actuator direct drives with high stiffness and resonant frequency for dynamic positioning.

A powerful real-time digital controller controls the drive axes

 

Capacitive position sensors

Direct, absolute position measurement with subnanometer accuracy and a high bandwidth and stability

 

Applications

Dynamic optimization of axial runout, eccentricity and evenness of rotation stages. Vibration insulation, fine adjustment

Specifications

Datasheet P-915KWEF

バージョン/日付
2015-03-30
バージョン/日付
2015-03-30
ドキュメントの言語

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P-915KWEF

Piezo Hexapod for Active and Dynamic Correction of Angular Errors of Rotation Stages

Downloads

データシート

Datasheet P-915KWEF

バージョン/日付
2015-03-30
バージョン/日付
2015-03-30
ドキュメントの言語