UPR-100 Ultraprecision Rotation Stage

PI UPR-100
Unlimited travel range
Velocity to 360 °/s
Repeatability to 1.4 µrad
Clear aperture with 20 mm diameter

Reference-class rotation stage

High travel accuracy. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).

Ironless magnetic direct drive

3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.

Application fields

Industry and research. Measuring technology, semiconductor manufacturing and testing, synchrotron applications


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Drawings / Images

PI UPR-100 Drawing

Ordering Information


3-D Models