Q-632 Q-Motion® Rotation Stage

Q-632 Q-Motion® Rotation Stage
製品について 仕様 ダウンロード 見積 / 発注
  • Only 32 mm in width and 8 mm in height
  • Direct position measurement with incremental encoder with 0.75 µrad resolution (optional)
  • Up to 3 µrad minimum incremental motion
  • Rotation range >360°
  • Velocity 45 °/s
  • Suitable for vacuum to 10-6 hPa, versions to 10-9 hPa available

Piezoelectric inertia drive

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 45 °/s

Application fields

Microassembly, photonics, optical alignment, microscopy, beamline instrumentation, semiconductor technology, test applications

Specifications

Datasheet Q-632 (英語)

バージョン/日付
2018-05-02
バージョン/日付
2018-05-02
ドキュメントの言語

Downloads

データシート

Datasheet Q-632 (英語)

バージョン/日付
2018-05-02
バージョン/日付
2018-05-02
ドキュメントの言語

ドキュメント

Short Instructions MP139EK

Q-5xx, Q-6xx PIShift Stages
バージョン/日付
3.1.0 2018-06-19

User Manual Q-632 (英語)

Q-632 Q-Motion Miniature Rotation Stage with 30 mm Turntable Diameter, Piezoelectric Inertia Drive
バージョン/日付
2015-02-24
バージョン/日付
2015-02-24
ドキュメントの言語

3D モデル

Q-632 STEP

ドキュメントの言語 英語

Quote / Order

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Q-632.930
Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, incremental encoder, 0.75 µrad resolution, 6 mNm torque, 30 mm diameter, vacuum compatible to 10-6 hPa
Q-632.900
Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, without position sensor for open-loop operation, 6 mNm torque, 30 mm diameter, vacuum compatible to 10-6 hPa
Q-632.90U
Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, without position sensor for open-loop operation, 6 mNm torque, 30 mm diameter, vacuum compatible to 10-9 hPa