D-510 PISeca Capacitive Sensors

D-510 PISeca Capacitive Sensors
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  • Noncontact distance measuring
  • Absolute position sensing
  • Vibration measuring
  • Subnanometer resolution
  • Flexible measuring range
  • Easy integration

Highest accuracy and lifetime due to capacitive position sensors

In conjunction with the electronics for signal processing, a resolution can be reached in the subnanometer range for quasistatic applications. The bandwidth can be increased up to 10 kHz for high dynamics application, where a resolution in the 1 nm range can still be reached. The linearity error is under 0.1%.

Easy handling and integration

All PISeca sensor heads are equipped with a LEMO connector for easy mounting and replacement. The uniform shaft thickness ensures compatibility and flexibility. The cable for connecting to the evaluation electronics is available in several variants and must therefore be ordered separately.

Customized versions / two-electrode sensors

In addition to the standard sensors listed here, PI offers a series if application-specific custom versions where for example, the measuring range, geometry or material are adapted to customer requirements. Customized electronics are also available.

The two-electrode sensors in the D-100 series are available for the highest demands on linearity and resolution.

Fields of application

Industry and research. Semiconductor manufacturing and inspection. Nanometrology. Active vibration absorber. Precision machining.

Specifications

Datasheet D-510 (英語)

バージョン/日付
2018-04-13
バージョン/日付
2018-04-13
バージョン/日付
2018-06-18
ドキュメントの言語

Downloads

データシート

Datasheet D-510 (英語)

バージョン/日付
2018-04-13
バージョン/日付
2018-04-13
バージョン/日付
2018-06-18
ドキュメントの言語

ドキュメント

Technical Note D510T0001 (英語)

D-510 PISeca Single-Electrode Capacitive Sensor Probe
バージョン/日付
2011-04-05
ドキュメントの言語 英語

3D モデル

D-510 STEP

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Connecting Cable

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