D-510 PISeca Capacitive Sensors

Single-Electrode Sensors with Excellent Position Resolution

Noncontact distance measuring
Absolute position sensing
Vibration measuring
Subnanometer resolution
Flexible measuring range
Easy integration

In conjunction with the electronics for signal processing, a resolution can be reached in the subnanometer range for quasistatic applications. The bandwidth can be increased up to 10 kHz for high dynamics application, where a resolution in the 1 nm range can still be reached. The linearity error is under 0.1%.

All PISeca sensor heads are equipped with a LEMO connector for easy mounting and replacement. The uniform shaft thickness ensures compatibility and flexibility. The cable for connecting to the evaluation electronics is available in several variants and must therefore be ordered separately.

In addition to the standard sensors listed here, PI offers a series if application-specific custom versions where for example, the measuring range, geometry or material are adapted to customer requirements. Customized electronics are also available.

The two-electrode sensors in the D-100 series are available for the highest demands on linearity and resolution.

Industry and research. Semiconductor manufacturing and inspection. Nanometrology. Active vibration absorber. Precision machining.

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日付 / バージョン

2019-10-24

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日付 / バージョン

2019-10-24

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日付 / バージョン

2021-01-19

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	D-510.021	D-510.051	D-510.101
Sensor type	Single electrode, capacitive	Single electrode, capacitive	Single electrode, capacitive

Measurement accuracy	D-510.021	D-510.051	D-510.101
Nominal measuring range*	20 µm	50 µm	100 µm
Smallest measuring gap in the nominal measuring range*	10 µm	25 µm	50 µm
Largest measuring gap in the 5-times extended measuring range*	150 µm	375 µm	750 µm
Static resolution**	<0.001 % of the measuring range (RMS)	<0.001 % of the measuring range (RMS)	<0.001 % of the measuring range (RMS)
Dynamic resolution**	<0.002 % of the measuring range (RMS)	<0.002 % of the measuring range (RMS)	<0.002 % of the measuring range (RMS)
Linearity error***	<0.2 %	<0.1 %	<0.1 %

Mechanical properties	D-510.021	D-510.051	D-510.101
Sensor active diameter	3.8 mm	6 mm	8.4 mm
Sensor active area	11.2 mm²	27.9 mm²	56.1 mm²
Sensor diameter	8 mm	12 mm	20 mm
Sensor area	50.3 mm²	113.1 mm²	314.0 mm²
Mounting shaft diameter	8 mm	8 mm	8 mm

Miscellaneous	D-510.021	D-510.051	D-510.101
Operating temperature range	-20 to 100 °C	-20 to 100 °C	-20 to 100 °C
Material	Stainless steel	Stainless steel	Stainless steel
Mass	8 g (±5 %)	10 g (±5 %)	16 g (±5 %)
Suitable connecting cable	D-891.01x, D-891.02x	D-891.01x, D-891.02x	D-891.01x, D-891.02x
Recommended electronics	E-852.10, E-852.10A1, E-711.SE3, E-509, E-509.E03, E-509.E3	E-852.10, E-852.10A1, E-711.SE3, E-509.E03, E-509.E3	E-852.10, E-852.10A1, E-711.SE3, E-509, E-509.E03, E-509.E3