P-517 • P-527 Multi-Axis Piezo Scanner

P-517 • P-527 Multi-Axis Piezo Scanner
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  • 2- and 3-axis versions (XY and XYθZ)
  • Travel ranges to 200 µm
  • Subnanometer resolution

Fields of application

  • Metrology
  • Interferometry
  • Photonics / integrated optics
  • Lithography
  • Nanopositioning
  • Scanning microscopy
  • Sample alignment
  • Micromachining

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk of motion to another axis can be actively compensated in real time (depending on the bandwidth) (active guiding). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

Specifications

Datasheet P-517 • P-527 (英語)

バージョン/日付
2018-05-08
バージョン/日付
2018-05-08
ドキュメントの言語

Downloads

データシート

Datasheet P-517 • P-527 (英語)

バージョン/日付
2018-05-08
バージョン/日付
2018-05-08
ドキュメントの言語

ドキュメント

Short Instructions PZ240EKDK (英語)

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
バージョン/日付
4.0.0 2017-02-06

User Manual PZ82 (英語)

P-517, P-518, P-527, P-528, P-558 Piezo Nanopositioning Systems with Capacitive Sensors
バージョン/日付
2013-09-05
バージョン/日付
2013-09-05
ドキュメントの言語

3D モデル

P-5x7 STEP

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