P-518 • P-528 Piezo Z/Tip/Tilt Stage

High Dynamics with Large Aperture

  • Z and tip/tilt stages with 3 axes / Z stages with 1 axis
  • Travel range in Z / tip/tilt angle to 200 µm / 2 mrad, closed loop (to 240 µm / 2.4 mrad open loop)
  • Parallel kinematics for faster response times and higher multi-axis accuracy
  • Zero-play, high-precision flexure guide system
  • Outstanding lifetime due to PICMA® piezo actuators
  • Clear aperture 66 mm × 66 mm
  • Highest linearity due to capacitive sensors
P-518 • P-528 Piezo Z/Tip/Tilt Stage
製品の解説 仕様 ダウンロード 見積 / 発注

Application fields

  • Metrology
  • Interferometry
  • Photonics / integrated optics
  • Lithography
  • Nanopositioning
  • Scanning microscopy
  • Sample alignment
  • Micromachining

Outstanding lifetime thanks to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk between axes can be actively compensated (active guiding) in real time (depending on the bandwidth). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

Specifications

データシート

Datasheet P-518 • P-528

日付 / バージョン
2024-01-09
pdf - 987 KB
日付 / バージョン
2024-01-09
pdf - 999 KB

Downloads

製品についての注意事項

製品についての注意事項

Product Change Notification Piezo Actuator Driven Products

日付 / バージョン
2021-04-19
pdf - 377 KB

データシート

データシート

Datasheet P-518 • P-528

日付 / バージョン
2024-01-09
pdf - 987 KB
日付 / バージョン
2024-01-09
pdf - 999 KB

ドキュメント

ドキュメント

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

日付 / バージョン
6.2.0 03/2024
pdf - 561 KB
日付 / バージョン
6.2.0 03/2024
pdf - 595 KB
ドキュメント

Technical Note P500T0002

Unpacking and Packing P-5xx Positioners

日付 / バージョン
2019-03-04
pdf - 448 KB
英語
ドキュメント

User Manual PZ82 (英語)

P-517, P-518, P-527, P-528, P-558 Piezo Nanopositioning Systems with Capacitive Sensors

日付 / バージョン
3.2.2 2023-04-13
pdf - 2 MB
日付 / バージョン
3.2.2 2023-04-13
pdf - 2 MB

3D モデル

3D モデル

P-5x8 3-D model

zip - 338 KB

Quote / Order

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