P-541.Z • P-541.T Piezo Z Stages / Z and Tip/Tilt Stages

Low profile for easy integration: 16.5 mm
Clear aperture 80 mm × 80 mm
Travel range to 150 µm
Tip/tilt angle to 1.2 mrad
Parallel kinematics for faster response times and higher multi-axis accuracy
Sensor technology: Inexpensive strain gauge sensors or capacitive sensors for higher performance
Outstanding lifetime due to PICMA® piezo actuators
Combination with microscope stages possible for long travel ranges

Fields of application

  • Scanning microscopy
  • Super-resolution microscopy
  • Biotechnology
  • Mask/wafer positioning
  • Sample positioning
  • Interferometry
  • Metrology

 

Specifications

Datasheet P-541.Z

バージョン/日付
2018-02-19
バージョン/日付
2018-02-19
ドキュメントの言語

Quote / Order

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Downloads

データシート

Datasheet P-541.Z

バージョン/日付
2018-02-19
バージョン/日付
2018-02-19
ドキュメントの言語

ドキュメント

Short Instructions PZ240EKDK (英語)

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
バージョン/日付
4.0.0 2017-02-06

3D モデル

P-541.Z STEP