S-303 Piezo Phase Shifters

S-303 Piezo Phase Shifters
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  • Resonant frequency 25 kHz for the highest dynamics
  • Travel range of up to 3 µm
  • Compact dimensions: Ø 30 mm × 10 mm
  • Open-loop versions with aperture
  • Invar option for the highest thermal stability

Fields of application

  • (Fizeau) interferometry
  • Optical nanomanipulation and inspection
  • Scanning microscopy

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Specifications

Datasheet S-303 (英語)

バージョン/日付
2018-05-08
バージョン/日付
2018-04-13
ドキュメントの言語

Downloads

データシート

Datasheet S-303 (英語)

バージョン/日付
2018-05-08
バージョン/日付
2018-04-13
ドキュメントの言語

ドキュメント

Short Instructions PZ277EK

S-3xx Piezo Tip/Tilt Platforms
バージョン/日付
1.0.0 November 2017

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