Integrated Piezo Actuators

Submillisecond Response Time and Subnanometer Resolution

  • Case with mechanical adapters for electrical insulation, simple integration and for protecting the actuator from ambient conditions
  • Mechanical preload allows dynamic operation
  • Flexure guides for straight motion
  • Mechanical lever amplification integrated into the flexure guide for large travel ranges
  • Strain gauge sensors (SGS) for repeatabilities down to a few nanometers

Applications

Mechanical integration of piezo actuators facilitates their application. To avoid pull forces at the piezo element, which necessarily occur in dynamic applications due to the inertia of the moving load, the piezo element must be provided with a mechanical preload. This can be done in mechanical cases or by means of flexure joints. The latter additionally guide or deflect the direction of motion or increase the travel range through lever amplification. PI's preloaded integrated piezo actuators offer an integration level between the pure piezo element and the piezo positioning system for simple positioning tasks.

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PiezoMove® Lever-Amplified Actuators

Guided Actuators with Travel Ranges of up to 2 mm

Guided and preloaded multilayer piezo actuators with lever amplification are used for valves, pumps, micro- and nanoliter dosing, active vibration isolation, sample handling, and imprint technologies in microfluidics, biotechnology, medical technology, mechatronics, adaptive systems technology, laser technology, and metrology.

Mechanical guiding, preload and lever amplification for travel ranges of up to 2 mm
Versions with strain gauge sensors for repeatabilities down to a few nanometers available
Low-cost original equipment manufacturer (OEM) solutions for integration, also for large quantities

Compact Actuators

Preloaded PICMA® Piezo Linear Actuators

Highly dynamic applications that simultaneously have high precision and force generation requirements can be found, among others, in precision mechanical engineering, material processing, material forming, and in active compensation of vibrations. Designs for vacuums down to 10-9 hPa and for particularly high or low operating temperatures are available.

Submillisecond response time and subnanometer resolution
Versions with SGS positioning available
Waterproof versions available

High-Load Actuators

Preloaded Compact PICA Piezo Linear Actuators

Highly dynamic applications that simultaneously have high precision and force generation requirements can be found, among others, in precision mechanical engineering, material processing, material forming, and in active compensation of vibrations. Designs for vacuums down to 10-9 hPa and for particularly high or low operating temperatures are available.

Submillisecond response time and subnanometer resolution
Compact stainless steel case with variable end pieces
Versions with SGS positioning available

PICMA® Bender Multilayer Actuators

with Position Sensor

Bimorph design, symmetric translation
Submillisecond response time and subnanometer resolution
Easy to integrate

Piezo Disk Translators

Bimorph design, symmetric translation
High dynamics
Low profile, easy to integrate

Motion Controllers and Amplifiers

PI offers a wide range of options for controlling integrated piezo actuators from cased digital motion controllers to OEM PC boards:

 

Which Drive Electronics
is Suitable?
PiezoMove® / PICMA®
without Sensors
U <120 V
PICA
without Sensors
U <1000 V
PiezoMove® / PICMA®
with Strain Gauge Sensors
PICA
with Strain Gauge Sensors
Mid-range dynamics,
mid-range loads
>> E-836
>> E-610
E-420>> E-610
>> E-625
E-420

Mid-range dynamics,
mid-range loads,
large quantities

>> E-831>> E-462--
Fast switching applications>> E-617
>> E-618
>> E-506
>> E-481>> E-500>> E-481
High loads
(>100 kg)
-E-420-E-420

 

 

Drivers and Controllers for PICMA® Stack/Chip Multilayer Actuators

Piezo amplifiers for >> PICMA® Multilayer Piezo Actuators offer an output voltage of up to 130 V.
Amplifiers with high output current allow dynamic operation of the actuators and precise positioning while requiring low power.

Drivers and Controllers for PICA Stack/Power/Thru Actuators

Piezo amplifiers for >> PICA Actuators offer a voltage range of up to 1100 V, which is available as unipolar or bipolar voltage. Amplifiers with high output current allow dynamic operation of the actuators and precise positioning while requiring low power.