The Right Position Sensor Technology

PI offers the widest range of high-dynamics and high-resolution nanopositioning systems worldwide. Their linearity and repeatability would not be possible without highest-resolution measuring devices.

Accuracies in the range of a few nanometers and below require a position measurement method that can also detect motion in this range. The most important specifications for selecting a suitable method are linearity, resolution (sensitivity), stability, bandwidth, and, last but not least, the costs. Another important factor is the ability to directly record the motion of the platform.

The contact with the movable parts also affects the measuring result; therefore, PI uses noncontact measurement methods as far as possible. Furthermore, the sensors need to be small and may not heat up. PI nanopositioning systems use four different types of sensors:

• Capacitive sensors
• Strain gauges sensors (SGS)
• Piezoresistive sensors (PRS)
• Linear encoders