The piezo-based scanning stage plays a key role in specimen positioning. It is designed for travel ranges of 100 or 200 µm along the axes of the scanning plane and 30 µm in direction of the Z axis and allows position resolution better than 2 nm.
In addition, active guiding using capacitive sensors increases path fidelity: The sensors measure any deviations in the perpendicular axis to the direction of motion.
Any undesired crosstalk of the motion can thus be detected and actively compensated in real time. The digital electronics performing the appropriate control also operate at a high cycle rate. This is crucial for the precise assignment of the scanner's position values and the recording camera.