V-522.1AA
PIMag® voice coil linear stage, direct drive, velocity 250 mm/s, 5 mm travel range, direct position measuring with incremental encoder, cable exit in direction of motion
V-522 • V-524 • V-528 PIMag® High Dynamics Linear Stage
Voice Coil Direct Drive with Direct Position Measuring
- Fast scanning and positioning
- Travel ranges 5 mm, 10 mm, 20 mm
- Scanning frequency of more than 10 Hz
- Max. Velocity 250 mm/s
- Crossed roller bearings for the highest precision
- PIMag® voice coil motor developed by PI
The V-522 reliably performs 20-nm repeatable steps.
V-52x, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
V-522, V-524, and V-528 PIMag® voice coil linear stages
Multi-axis setup with two V-528 PIMag® voice coil linear stages
V-522 • V-524 • V-528 PIMag® High Dynamics Linear Stage
製品の解説
仕様
ダウンロード
見積 / 発注
Reference-class linear stage
Linear stages with magnetic direct drives largely dispense with mechanical components in the drivetrain and the drive force acts directly on the motion platform. Together with precision bearings, a high travel accuracy and longer lifetime is achieved. The linear stages are particularly suitable for scanning applications.
PIMag® voice coil motor
Voice coil motors are direct drives. In direct drives, the force of the drive element is transmitted directly to the load to be moved without the use of mechanical transmission elements such as coupling, drive screw, or gearhead. Voice coil drives consist of a permanent magnet and a winding body that are located in the air gap of the magnetic field. When current flows through the winding body, it moves in the magnetic field of the permanent magnet. Thanks to their low weight and friction-free drive principle, voice coil drives are particularly suitable for applications that require high dynamics and high velocities at limited travel ranges. High scan frequencies and precision positioning are also possible with these drives, because they are free of the effects of hysteresis.
PIMag®
PI develops proprietary magnetic motors if positioning systems need to achieve specific performance characteristics that cannot be reached by using drive components currently available on the market, for example, to achieve a high force density or a compact design. The motors developed in-house are identified by the PIMag® brand name.
Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guide accuracy and load capacity. Force-guided rolling element cages prevent cage creep.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Application fields
Industry and research. Measuring technology. Photonics and precision scanning in semiconductor or flat panel display manufacturing.
Specifications
Specifications
Select a travel range:
Click inside the table and use your arrow keys to scroll left or right.
| Motion | V-522.1AA | V-522.1AB | V-524.1AA | V-524.1AB | V-528.1AA | V-528.1AB | Tolerance |
|---|---|---|---|---|---|---|---|
| Active axes | X | X | X | X | X | X | |
| Travel range in X | 5 mm | 5 mm | 10 mm | 10 mm | 20 mm | 20 mm | |
| Maximum velocity in X, unloaded | 250 mm/s | 250 mm/s | 250 mm/s | 250 mm/s | 250 mm/s | 250 mm/s | |
| Straightness (Linear crosstalk in Y with motion in X) | ± 0.25 µm | ± 0.25 µm | ± 0.5 µm | ± 0.5 µm | ± 1.25 µm | ± 1.25 µm | typ. |
| Flatness (Linear crosstalk in Z with motion in X) | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.5 µm | ± 0.5 µm | typ. |
| Pitch (Rotational crosstalk in θY with motion in X) | ± 50 µrad | ± 50 µrad | ± 100 µrad | ± 100 µrad | ± 200 µrad | ± 200 µrad | typ. |
| Yaw (Rotational crosstalk in θZ with motion in X) | ± 50 µrad | ± 50 µrad | ± 100 µrad | ± 100 µrad | ± 200 µrad | ± 200 µrad | typ. |
| Positioning | V-522.1AA | V-522.1AB | V-524.1AA | V-524.1AB | V-528.1AA | V-528.1AB | Tolerance |
| Minimum incremental motion in X | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | 0.02 µm | typ. |
| Bidirectional repeatability in X | 0.12 µm | 0.12 µm | 0.12 µm | 0.12 µm | 0.12 µm | 0.12 µm | typ. |
| Reference switch | Optical | Optical | Optical | Optical | Optical | Optical | |
| Reference switch repeatability | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | max. |
| Integrated sensor | Incremental linear encoder | Incremental linear encoder | Incremental linear encoder | Incremental linear encoder | Incremental linear encoder | Incremental linear encoder | |
| Sensor signal | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | |
| Sensor resolution | 10 nm | 10 nm | 10 nm | 10 nm | 10 nm | 10 nm | |
| Drive Properties | V-522.1AA | V-522.1AB | V-524.1AA | V-524.1AB | V-528.1AA | V-528.1AB | Tolerance |
| Drive type | Voice coil | Voice coil | Voice coil | Voice coil | Voice coil | Voice coil | |
| Nominal voltage | 24 V | 24 V | 24 V | 24 V | 24 V | 24 V | |
| Nominal current, RMS | 1 A | 1 A | 1 A | 1 A | 1 A | 1 A | typ. |
| Peak current, RMS | 3 A | 3 A | 3 A | 3 A | 3 A | 3 A | typ. |
| Drive force in X | 3.4 N | 3.4 N | 2.9 N | 2.9 N | 2.3 N | 2.3 N | typ. |
| Peak force in X | 10.2 N | 10.2 N | 8.7 N | 8.7 N | 6.9 N | 6.9 N | |
| Force constant | 3.4 N/A | 3.4 N/A | 2.9 N/A | 2.9 N/A | 2.3 N/A | 2.3 N/A | |
| Motor constant | 1.3 N/√W | 1.3 N/√W | 1.1 N/√W | 1.1 N/√W | 0.85 N/√W | 0.85 N/√W | typ. |
| Time constant | 0.32 ms | 0.32 ms | 0.32 ms | 0.32 ms | 0.32 ms | 0.32 ms | |
| Resistance phase-phase | 7.2 Ω | 7.2 Ω | 7.2 Ω | 7.2 Ω | 7.2 Ω | 7.2 Ω | typ. |
| Inductance phase-phase | 1.7 mH | 1.7 mH | 1.7 mH | 1.7 mH | 1.7 mH | 1.7 mH | |
| Back EMF | 3.4 V·s/m | 3.4 V·s/m | 2.9 V·s/m | 2.9 V·s/m | 2.3 V·s/m | 2.3 V·s/m | max. |
| Permissible maximum temperature for positioner components | 75 °C | 75 °C | 75 °C | 75 °C | 75 °C | 75 °C | |
| Mechanical Properties | V-522.1AA | V-522.1AB | V-524.1AA | V-524.1AB | V-528.1AA | V-528.1AB | Tolerance |
| Permissible push force in Z | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | max. |
| Moved mass in X, unloaded | 131 g | 131 g | 137 g | 137 g | 150 g | 150 g | |
| Guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | |
| Overall mass | 460 g | 460 g | 500 g | 500 g | 580 g | 580 g | |
| Material | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | |
| Miscellaneous | V-522.1AA | V-522.1AB | V-524.1AA | V-524.1AB | V-528.1AA | V-528.1AB | Tolerance |
| Operating temperature range | 18 to 45 °C | 18 to 45 °C | 18 to 45 °C | 18 to 45 °C | 18 to 45 °C | 18 to 45 °C | |
| Connector | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | |
| Cable length | 2 m | 2 m | 2 m | 2 m | 2 m | 2 m | |
| Cable exit | Cable exit in X | Cable exit in Y | Cable exit in X | Cable exit in Y | Cable exit in X | Cable exit in Y | |
| Recommended controllers / drivers | C-413.2G(A), C-413.20(A) | C-413.2G(A), C-413.20(A) | C-413.2G(A), C-413.20(A) | C-413.2G(A), C-413.20(A) | C-413.2G(A), C-413.20(A) | C-413.2G(A), C-413.20(A) |
Note on sensor resolution: With C-413 controller
The specifications apply to room temperature (22 °C ± 3 °C) and can deviate outside of this range.
Ask about customized versions.
Downloads
製品についての注意事項
製品についての注意事項
Product Change Notification V-524, V-528
日付 / バージョン
2020-01-20
pdf - 50 KB
英語
データシート
ドキュメント
ドキュメント
User Manual V522T0002 (英語)
V-522 / V-524 / V-528 PIMag® Voice Coil Linear Stages for 5 mm / 10 mm / 20 mm Travel Range
日付 / バージョン
2024-02-01
pdf - 3 MB
英語
３D モデル
３D モデル
V-52x 3-D model
zip - 3 MB
アニメーション化された３D モデル
アニメーション化された３D モデル
Animated 3-D Model V-522.1AB
zip - 253 KB
アニメーション化された３D モデル
Animated 3-D Model V-522.1AA
zip - 254 KB
アニメーション化された３D モデル
Animated 3-D Model V-524.1AA
zip - 260 KB
アニメーション化された３D モデル
Animated 3-D Model V-524.1AB
zip - 257 KB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
V-522.1AB
PIMag® voice coil linear stage, direct drive, velocity 250 mm/s, 5 mm travel range, direct position measuring with incremental encoder, cable exit orthogonal to direction of motion
V-524.1AA
PIMag® voice coil linear stage, direct drive, velocity 250 mm/s, 10 mm travel range, direct position measuring with incremental encoder, cable exit in direction of motion
V-524.1AB
PIMag® voice coil linear stage, direct drive, velocity 250 mm/s, 10 mm travel range, direct position measuring with incremental encoder, cable exit orthogonal to direction of motion
V-528.1AA
PIMag® voice coil linear stage, direct drive, velocity 250 mm/s, 20 mm travel range, direct position measuring with incremental encoder, cable exit in direction of motion
V-528.1AB
PIMag® voice coil linear stage, direct drive, velocity 250 mm/s, 20 mm travel range, direct position measuring with incremental encoder, cable exit orthogonal to direction of motion
