V-Z03.016211E0 新製品!
High-load precision Z stage; Voice coil; 5 mm travel range; 150 N load capacity; 200 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak
新製品
V-Z03 High-Load Precision Z Stage
High Performance and Cost Efficiency, VCM Direct Drive, High Rigidity
- Travel range to 5 mm
- Optical linear encoder
- High rigidity and low pitch/yaw
- Load capacity to 150 N
- With self-locking force
Direction of axes and torques for Z stages
V-Z03, dimensions in mm
V-Z03 High-Load Precision Z Stage
製品の解説
仕様
ダウンロード
見積 / 発注
Precision-class Z stage
Extremely accurate and reliable positioning. Anti-creep crossed roller guides for smooth feed at high loads. Non-contact limit and reference switches (Hall effect).
Voice coil direct drive
Voice coil motors are direct drives. In direct drives, the force of the drive element is transmitted directly to the load and move without the use of mechanical transmission elements such as coupling, drive screw, or gearhead. Voice coil drives have another advantage is quick responsibility.
Highly accurate position measuring with incremental linear encoder
Noncontact option encoders measure the position directly at the platform with greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Crossed roller guide
With cross roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy. Force-guided rolling element cages prevent cage creep.
Pneumatic counterbalance
Integrated with pneumatic counterbalance which can reach up to 150 N.
Application fields
Precision positioning in industry and research. Semiconductor inspection.
Specifications
Specifications
| Motion | V-Z03.016211E0 | Tolerance |
|---|---|---|
| Active axes | Z | |
| Travel range in Z | 5 mm | |
| Maximum velocity in Z, unloaded | 200 mm/s | |
| Flatness (Linear crosstalk in X with motion in Z) | ± 0.6 µm | max. |
| Straightness (Linear crosstalk in Y with motion in Z) | ± 0.5 µm | max. |
| Yaw (Rotational crosstalk in θX with motion in Z) | ± 10 µrad | max. |
| Pitch (Rotational crosstalk in θY with motion in Z) | ± 10 µrad | max. |
| Positioning | V-Z03.016211E0 | Tolerance |
| Minimum incremental motion in Z | 0.035 µm | typ. |
| Positioning accuracy in Z, calibrated | ± 0.3 µm | typ. |
| Bidirectional repeatability in Z | 0.4 µm | typ. |
| Integrated sensor | Incremental linear encoder | |
| Sensor signal | Sin/cos, 1 V peak-peak | |
| Sensor signal period | 20 µm | |
| System resolution in Z | 5 nm | |
| Drive Properties | V-Z03.016211E0 | Tolerance |
| Drive type | Voice coil | |
| Nominal voltage | 60 V | |
| Nominal current, RMS | 2.26 A | typ. |
| Peak current, RMS | 9.9 A | typ. |
| Drive force in Z | 40 N | typ. |
| Peak force in Z | 180 N | |
| Force constant | 27.6 N/A | |
| Motor constant | 15.4 N/√W | typ. |
| Time constant | 0.32 ms | |
| Resistance phase-phase | 1.6 Ω | typ. |
| Inductance phase-phase | 4.89 mH | |
| Back EMF phase-phase | 13.8 V·s/m | max. |
| Power dissipation of the coil with 100 % duty cycle | 9.9 W | |
| Mechanical Properties | V-Z03.016211E0 | Tolerance |
| Permissible push force in Z | 150 N | max. |
| Guide | Crossed roller guide | |
| Overall mass | 6500 g | |
| Material | Aluminum, black anodized; stainless steel | |
| Miscellaneous | V-Z03.016211E0 | Tolerance |
| Operating temperature range | 5 to 40 °C | |
| Connector | D-Sub 26 (m) | |
| Sensor connector | D-sub 15 (m) | |
| Air connector | Fitting for tubing with 4 mm outer diameter | |
| Recommended controllers / drivers | S-C02-2CST, S-C02-2CSC, G-910.RC0242200, ACS modular controller |
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
