L-306.011100
Compact precision Z stage; 2-phase stepper motor; 13 mm travel range; 20 N load capacity; 5 mm/s maximum velocity; ball screw; 0.5 m cable length
L-306 Compact Precision Z Stage
Compact Design, Multi-Axis Combinations
- Compact design: Surface 63 × 63 mm
- Stepper motors and closed-loop DC motors
- Optional: Linear encoder for direct position measuring
- Crossed roller guides
- Noncontact reference and limit switches
L-306, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
L-306 Compact Precision Z Stage
製品の解説
仕様
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見積 / 発注
Compact Z stage, versatile in use
Z stage with compact size due to folded drive with belt gears. Fits onto linear stages with M6 50 mm × 50 mm connection grid (e.g., L-406).
Drive
- 2-phase stepper motor or closed-loop DC motor
- Backlash-compensated ball screws
Position measuring
- Incremental linear encoder (optional with stepper motor variants)
- Noncontact optical reference and limit switches
Highly-accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position with highest accuracy directly on the platform Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Crossed roller guide
For crossed roller guides, the point contact of balls in ball guides is replaced by the line contact of hardened rollers. Consequently, they are considerably stiffer and need less preloading, which reduces friction and enables smoother running. Crossed roller guides are also characterized by high guide accuracy and load capacity. Force-guided rolling element cages prevent cage creep.
Application fields
Research. Semiconductor technology. Photonics. Automation.
Specifications
Specifications
| Motion | L-306.011100 | L-306.011112 | L-306.013112 | Tolerance |
|---|---|---|---|---|
| Active axes | Z | Z | Z | |
| Travel range in Z | 13 mm | 13 mm | 13 mm | |
| Maximum velocity in Z, unloaded | 5 mm/s | 5 mm/s | 5 mm/s | |
| Straightness error in X | ± 3 µm | ± 3 µm | ± 3 µm | typ. |
| Straightness error in Y | ± 3 µm | ± 3 µm | ± 3 µm | typ. |
| Angular error around X | ± 150 µrad | ± 150 µrad | ± 150 µrad | typ. |
| Angular error around Y | ± 175 µrad | ± 175 µrad | ± 175 µrad | typ. |
| Positioning | L-306.011100 | L-306.011112 | L-306.013112 | Tolerance |
| Minimum incremental motion in Z | 2.5 µm | 0.1 µm | 0.1 µm | typ. |
| Unidirectional repeatability in Z | ± 0.25 µm | ± 0.05 µm | ± 0.05 µm | typ. |
| Bidirectional repeatability in Z | 4 µm | 1 µm | 1 µm | typ. |
| Reference switch | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | |
| Limit switches | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | Forked photoelectric sensor, N/C contact, 5 V, NPN | |
| Integrated sensor | — | Incremental linear encoder | Incremental linear encoder | |
| Sensor signal | — | A/B quadrature, RS-422 | A/B quadrature, RS-422 | |
| Sensor resolution | — | 5 nm | 50 nm | |
| Drive Properties | L-306.011100 | L-306.011112 | L-306.013112 | Tolerance |
| Drive type | 2-phase stepper motor | 2-phase stepper motor | DC motor | |
| Drive force in positive direction of motion in Z | 20 N | 20 N | 20 N | typ. |
| Drive force in negative direction of motion in Z | 20 N | 20 N | 20 N | typ. |
| Mechanical Properties | L-306.011100 | L-306.011112 | L-306.013112 | Tolerance |
| Permissible push force in Y | 10 N | 10 N | 10 N | max. |
| Permissible push force in Z | 20 N | 20 N | 20 N | max. |
| Permissible torque in θX | 1 N·m | 1 N·m | 1 N·m | max. |
| Permissible torque in θY | 1 N·m | 1 N·m | 1 N·m | max. |
| Permissible torque in θZ | 2 N·m | 2 N·m | 2 N·m | max. |
| Holding force in Z, passive | 20 N | 20 N | — | |
| Moved mass in Z, unloaded | 180 g | 180 g | 180 g | |
| Drive screw type | Ball screw | Ball screw | Ball screw | |
| Drive screw pitch | 0.5 mm | 0.5 mm | 0.5 mm | |
| Guide | Crossed roller guide | Crossed roller guide | Crossed roller guide | |
| Overall mass | 600 g | 600 g | 600 g | |
| Material | Anodized aluminum, steel | Anodized aluminum, steel | Anodized aluminum, steel | |
| Miscellaneous | L-306.011100 | L-306.011112 | L-306.013112 | Tolerance |
| Operating temperature range | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | |
| Connector | HD D-sub 26 (m) | HD D-sub 26 (m) | HD D-sub 26 (m) | |
| Cable length | 0.5 m | 0.5 m | 0.5 m | |
| Recommended controllers / drivers | C-663.12 C-885 with C-663.12C885 ACS modular controller | C-663.12 C-885 with C-663.12C885 ACS modular controller | C-863.12 C-885 with C-863.20C885 ACS modular controller |
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
Downloads
データシート
ドキュメント
ドキュメント
User Manual L306T0002
Compact Z positioner L-306.011100 / 011112 / 013112
日付 / バージョン
2024-09-26
pdf - 1 MB
日付 / バージョン
2024-09-26
pdf - 1 MB
３D モデル
３D モデル
L-306 3-D model
zip - 2 MB
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
L-306.011112
Compact precision Z stage; 2-phase stepper motor; 13 mm travel range; 20 N load capacity; 5 mm/s maximum velocity; ball screw; incremental linear encoder, 5 nm sensor resolution, A/B quadrature, RS-422; 0.5 m cable length
L-306.013112
Compact precision Z stage; DC motor; 13 mm travel range; 20 N load capacity; 5 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422; 0.5 cable length
