Product overview
A-523 is an air bearing Z tip/tilt stage with direct drive. Designed as a parallel-kinematic multi-axis system, the platform can be used for Z and tip/tilt motion. This stage offers ultra-precision in miniature format. The combination of the noncontact components results in a frictionless motion platform that offers top performance, quality, and lifetime.
When the A-523 is ordered together with a controller of the A-81x or A-82x series, PI carries out the configuration and cabling of the Z stage with applied servo tuning optimization and under applied load. You receive a complete, ready-to-use positioning system.
Accessories and options
Application fields
The Z tip/tilt stage is ideally suited for high-precision applications, such as wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and ultra-LED manufacturing. The noncontact design is ideal for cleanroom applications.
| Motion | A-523.25005B3 | Tolerance |
|---|---|---|
| Active axes | Z θX θY | |
| Travel range in Z | 5 mm | |
| Rotation range in θX | 2 ° | |
| Rotation range in θY | 1.6 ° | |
| Acceleration in Z, unloaded | 10 m/s² | max. |
| Maximum velocity in Z, unloaded | 200 mm/s | |
| Yaw (Rotational crosstalk in θX with motion in Z) | ± 25 µrad | typ. |
| Pitch (Rotational crosstalk in θY with motion in Z) | ± 25 µrad | typ. |
| Positioning | A-523.25005B3 | Tolerance |
| Minimum incremental motion in Z | 0.01 µm | typ. |
| Minimum incremental motion in θX | 0.06 µrad | typ. |
| Minimum incremental motion in θY | 0.06 µrad | typ. |
| Positioning accuracy in Z, calibrated | ± 0.5 µm | typ. |
| Positioning accuracy in θX, uncalibrated | ± 15 µrad | typ. |
| Positioning accuracy in θY, uncalibrated | ± 15 µrad | typ. |
| Bidirectional repeatability in Z | 0.25 µm | typ. |
| Bidirectional repeatability in θX | 8 µrad | typ. |
| Bidirectional repeatability in θY | 8 µrad | typ. |
| Integrated sensor | Absolute linear encoder | |
| Sensor signal | BiSS-C | |
| Sensor resolution | 1 nm | |
| Drive Properties | A-523.25005B3 | Tolerance |
| Drive type | Ironless 3-phase linear motor | |
| Nominal voltage | 24 V | |
| Peak voltage | 60 V | |
| Nominal current, RMS | 1.4 A | typ. |
| Peak current, RMS | 2.8 A | typ. |
| Force constant | 5.9 N/A | |
| Resistance phase-phase | 5.2 Ω | typ. |
| Inductance phase-phase | 1 mH | |
| Back EMF phase-phase | 4.2 V·s/m | max. |
| Pole pitch N-N | 19.66 mm | |
| Mechanical Properties | A-523.25005B3 | Tolerance |
| Permissible push force in Z | 80 N | max. |
| Guide | Air bearing guide with air preload | |
| Overall mass | 8200 g | |
| Material | Hardcoat aluminum, stainless steel mounting hardware | |
| Miscellaneous | A-523.25005B3 | Tolerance |
| Operating temperature range | +15 to +25 °C | |
| Connector | HD D-sub 26-pin (m) | |
| Air bearing connection | Plug connection for hose with 6 mm outer diameter | |
| Operating pressure | 515 to 585 (75 to 85 psi) kPa | |
| Air consumption | 84 L/min | max. |
| Air quality | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | |
| Recommended controllers / drivers | A-814 (four axes), A-82x (4 / 6 / 8 axes) |
Note on travel and rotation ranges: The travel range in Z and the rotation areas in θX and θY depend on each other. The values in the table show the maximum travel range for each axis, when all other axes are at the reference position. If one axis has reached its maximum position, movement of the other axes is not possible.
Note on acceleration and velocity: The given values are valid in an unloaded state.
Note on positioning accuracy: The calibrated accuracy can only be achieved with a controller-driven error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short duration and do not consider the long-term effects of thermal drift on the stage.
Note on minimum incremental motion: Is directly related to the system stability (servo jitter); this depends on the servo drive used. The position stability can be improved by using ServoBoostTM PLUS on an ACS SPiiPlus controller.
Note on the nominal and peak voltages and the nominal and peak currents: The given values apply per motor. The stage contains three motors.
Note on the permissible push force: Assumes an operating pressure of 480 kPa of the air bearings. The stage is designed for horizontal operation only.
Note on the operating pressure: To protect the stage against damage, it is recommended to connect an air pressure sensor to the E-Stop input of the controller.
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
PIglide high-precision Z tip/tilt stage with air bearings; ironless 3-phase linear motor; 5 mm travel range; 2 ° × 1.6 ° rotational angle (θX × θY); 80 N load capacity; 200 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C
