This product has been replaced by the following new product: Q-632 Q‑Motion® Rotation Stage

Q-622 Q-Motion® Miniature Rotation Stage

Minimum Dimensions: 22 mm Turntable Diameter

  • Only 22 mm in width and 10 mm in height
  • Direct position measurement with incremental encoder with 0.55 µrad resolution
  • Up to 2.2 µrad minimum incremental motion
  • Velocity 70 °/s
  • Mountable on the Q-522 linear stage without adapter
  • Suitable for vacuum to 10-6 hPa, versions to 10-9 hPa available
Q-622 Q-Motion® Miniature Rotation Stage
製品の解説 仕様 ダウンロード 見積 / 発注

Piezoelectric inertia drive

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 70 °/s

Application fields

Microassembly, Photonics, Optical alignment, Microscopy, Beamline instrumentation, Semiconductor technology, Testing

Specifications

データシート

Datasheet Q-622

日付 / バージョン
2019-01-22
pdf - 624 KB
日付 / バージョン
2019-01-22
pdf - 631 KB
日付 / バージョン
2019-01-22
pdf - 705 KB

Downloads

製品についての注意事項

製品についての注意事項

Product Change Notification Q-xxx; N-765

日付 / バージョン
2019-03-26
pdf - 435 KB

データシート

データシート

Datasheet Q-622

日付 / バージョン
2019-01-22
pdf - 624 KB
日付 / バージョン
2019-01-22
pdf - 631 KB
日付 / バージョン
2019-01-22
pdf - 705 KB

ドキュメント

ドキュメント

User Manual MP128

Q-622 Q-Motion Miniature Rotation Stage with 22 mm Turntable Diameter, Piezoelectric Inertia Drive

日付 / バージョン
1.1.0 2017-11-28
pdf - 2 MB
日付 / バージョン
1.1.0 2017-11-28
pdf - 2 MB
ドキュメント

Short Instructions MP139EK

Q-Motion® Positioners: Q-5xx, Q-6xx

日付 / バージョン
4.3.0 03/2024
pdf - 626 KB
日付 / バージョン
4.3.0 03/2024
pdf - 661 KB

3D モデル

3D モデル

Q-622 3-D model

zip - 675 KB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

Q-622.930

Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, incremental encoder, 0.55 µrad resolution, 5 mNm torque, 22 mm diameter, vacuum compatible to 10-6 hPa

Q-622.900

Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, without position sensor for open-loop operation, 5 mNm torque, 22 mm diameter, vacuum compatible to 10-6 hPa

Q-622.90U

Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, without position sensor for open-loop operation, 5 mNm torque, 22 mm diameter, vacuum compatible to 10-9 hPa

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