P-733.3 XYZ Piezo Nanopositioner

High-Precision XYZ Scanner with Aperture

Travel ranges to 100 µm × 100 µm in X, Y and to 10 µm in Z
Resolution to 0.1 nm due to capacitive sensors
High velocity versions with direct drive
Ultrahigh vacuum-compatible and nonmagnetic versions on request
Parallel kinematics for higher accuracy and dynamics
Parallel metrology for active compensation of guiding errors
Zero-play, high-precision flexure guide system
Clear aperture 50 mm × 50 mm for transmitted-light applications

P-733.3CD / .3CL, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

P-733.3DD, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Application fields

Scanning microscopy
Confocal microscopy
Mask/wafer positioning
Surface measuring technology
Nanoimprinting
Micromanipulation
Image processing / stabilization
Nanopositioning with high flatness and straightness of motion

Outstanding lifetime thanks to PICMA^® piezo actuators

The PICMA^® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA^® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk between axes can be actively compensated (active guiding) in real time (depending on the bandwidth). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

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データシート

日付 / バージョン

2023-12-11

pdf - 883 KB

日付 / バージョン

2023-12-11

pdf - 887 KB

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Motion	P-733.3CD	P-733.3CL	P-733.3DD	Tolerance
Active axes	X Y Z	X Y Z	X Y Z
Travel range in X	100 µm	100 µm	30 µm
Travel range in Y	100 µm	100 µm	30 µm
Travel range in Z	10 µm	10 µm	10 µm
Travel range in X, open loop, at -20 to 120 V	115 µm	115 µm	33 µm	+20 / -0 %
Travel range in Y, open loop, at -20 to +120 V	115 µm	115 µm	33 µm	+20 / -0 %
Travel range in Z, open loop, at -20 to 120 V	12 µm	12 µm	14 µm	+20 / -0 %
Linearity error in X	0.03 %	0.03 %	0.03 %	typ.
Linearity error in Y	0.03 %	0.03 %	0.03 %	typ.
Linearity error in Z	0.03 %	0.03 %	0.03 %	typ.
Pitch (Rotational crosstalk in θX with motion in Y)	± 3 µrad	± 3 µrad	± 5 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 3 µrad	± 3 µrad	± 5 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in Z)	± 5 µrad	± 5 µrad	± 5 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 10 µrad	± 10 µrad	± 10 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in Y)	± 10 µrad	± 10 µrad	± 10 µrad	typ.
Positioning	P-733.3CD	P-733.3CL	P-733.3DD	Tolerance
Unidirectional repeatability in X	± 2 nm	± 2 nm	± 2 nm	typ.
Unidirectional repeatability in Y	± 2 nm	± 2 nm	± 2 nm	typ.
Unidirectional repeatability in Z	± 1 nm	± 1 nm	± 1 nm	typ.
Resolution in X, open loop	0.2 nm	0.2 nm	0.1 nm	typ.
Resolution in Y, open loop	0.2 nm	0.2 nm	0.1 nm	typ.
Resolution in Z, open loop	0.1 nm	0.1 nm	0.1 nm	typ.
Integrated sensor	Capacitive, indirect position measuring	Capacitive, indirect position measuring	Capacitive, indirect position measuring
System resolution in X	0.3 nm	0.3 nm	0.1 nm	typ.
System resolution in Y	0.3 nm	0.3 nm	0.1 nm	typ.
System resolution in Z	0.2 nm	0.2 nm	0.1 nm	typ.
Drive Properties	P-733.3CD	P-733.3CL	P-733.3DD	Tolerance
Drive type	PICMA®	PICMA®	PICMA®
Electrical capacitance in X	6 µF	6 µF	6.2 µF	±20 %
Electrical capacitance in Y	6 µF	6 µF	6.2 µF	±20 %
Electrical capacitance in Z	2.4 µF	2.4 µF	3.3 µF	±20 %
Mechanical Properties	P-733.3CD	P-733.3CL	P-733.3DD	Tolerance
Stiffness in X	1.4 N/µm	1.4 N/µm	4 N/µm	±20 %
Stiffness in Y	1.4 N/µm	1.4 N/µm	4 N/µm	±20 %
Stiffness in Z	9 N/µm	9 N/µm	10 N/µm	±20 %
Resonant frequency in X, unloaded	460 Hz	460 Hz	1200 Hz	±20 %
Resonant frequency in X, under load with 120 g	340 Hz	340 Hz		±20 %
Resonant frequency in X, under load with 200 g	295 Hz	295 Hz	530 Hz	±20 %
Resonant frequency in Y, unloaded	460 Hz	460 Hz	1200 Hz	±20 %
Resonant frequency in Y, under load with 120 g	340 Hz	340 Hz		±20 %
Resonant frequency in Y, under load with 200 g	295 Hz	295 Hz	530 Hz	±20 %
Resonant frequency in Z, unloaded	1400 Hz	1400 Hz	1100 Hz	±20 %
Resonant frequency in Z, under load with 120 g	1060 Hz	1060 Hz		±20 %
Resonant frequency in Z, under load with 200 g	650 Hz	650 Hz	635 Hz	±20 %
Permissible push force in X	50 N	50 N	50 N	max.
Permissible push force in Y	50 N	50 N	50 N	max.
Permissible push force in Z	50 N	50 N	50 N	max.
Permissible pull force in X	20 N	20 N	20 N	max.
Permissible pull force in Y	20 N	20 N	20 N	max.
Permissible pull force in Z	20 N	20 N	20 N	max.
Overall mass	675 g	675 g	675 g	±5 %
Material	Aluminum	Aluminum	Aluminum
Miscellaneous	P-733.3CD	P-733.3CL	P-733.3DD	Tolerance
Operating temperature range	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C
Connector	D-sub 25W3 (m)	LEMO FFA.00.250.CTAC22	D-sub 25W3 (m)
Cable length	1.5 m	1.5 m	1.5 m	±10 mm
Recommended controllers / drivers	E-503, E-505, E-610, E-621, E-625, E-712, E-727	E-503, E-505, E-610, E-621, E-625, E-712, E-727	E-503, E-505, E-610, E-621, E-625, E-712, E-727
Sensor connector		LEMO FFA.00.250.CTLC31

P-733.3DD: Linearity error with digital controller. With analog controllers, the typical linearity error for direct drive positioners can be up to 0.1 %.

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

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製品についての注意事項

日付 / バージョン

2021-04-19

pdf - 377 KB

英語

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データシート

日付 / バージョン

2023-12-11

pdf - 883 KB

日付 / バージョン

2023-12-11

pdf - 887 KB

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ドキュメント

P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors

日付 / バージョン

1.1.0 2020-10-26

pdf - 2 MB

日付 / バージョン

1.1.0 2020-10-26

pdf - 2 MB

ドキュメント

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

日付 / バージョン

6.2.0 03/2024

pdf - 561 KB

日付 / バージョン

6.2.0 03/2024

pdf - 595 KB

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３D モデル

zip - 2 MB

パンフレット

Sample Stages and Holders for Inverted Microscopes

日付 / バージョン

BRO70E R3D

pdf - 4 MB

英語

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見積/発注へ

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

P-733.3CD

XYZ piezo nanopositioner; 100 µm × 100 µm × 10 µm travel range (X × Y × Z); capacitive, indirect position measuring; D-sub 25W3 (m); 1.5 m cable length

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P-733.3CL

XYZ piezo nanopositioner; 100 µm × 100 µm × 10 µm travel range (X × Y × Z); capacitive, indirect position measuring; LEMO connectors; 1.5 m cable length

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P-733.3DD

XYZ piezo nanopositioner; 30 µm × 30 µm × 10 µm travel range (X × Y × Z); capacitive, indirect position measuring; D-sub 25W3 (m); 1.5 m cable length

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