P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioner for up to 3 Axes

  • Parallel kinematics in the X and Y axes for faster response times and greater multi-axis accuracy
  • Travel ranges to 300 × 300 × 300 µm
  • Highest linearity due to capacitive sensors
  • Zero-play and highly accurate flexure guides
  • Excellent scanning flatness
  • High dynamics XYZ version
  • Clear aperture 66 mm × 66 mm
  • Outstanding lifetime thanks to PICMA® piezo actuators
  • UHV versions to 10-9 hPa
P-561 • P-562 • P-563 PIMars Nanopositioning Stage
製品の解説 仕様 ダウンロード 見積 / 発注

Application fields

  • Scanning microscopy
  • Mask / wafer positioning
  • Interferometry
  • Measuring technology
  • Biotechnology
  • Scanning and screening

Outstanding lifetime due to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the mechanics' D-sub connector. The auto calibration function on the digital controller automatically uses this data every time the controller is switched on.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk between axes can be actively compensated (active guiding) in real time (depending on the bandwidth). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

Specifications

データシート

Datasheet P-561 • P-562 • P-563 (英語)

日付 / バージョン
2023-12-11
pdf - 776 KB
日付 / バージョン
2023-12-11
pdf - 779 KB
日付 / バージョン
2018-06-20
pdf - 856 KB
日付 / バージョン
2018-07-02
pdf - 932 KB

Downloads

製品についての注意事項

製品についての注意事項

Product Change Notification Piezo Actuator Driven Products

日付 / バージョン
2021-04-19
pdf - 377 KB

データシート

データシート

Datasheet P-561 • P-562 • P-563 (英語)

日付 / バージョン
2023-12-11
pdf - 776 KB
日付 / バージョン
2023-12-11
pdf - 779 KB
日付 / バージョン
2018-06-20
pdf - 856 KB
日付 / バージョン
2018-07-02
pdf - 932 KB

ドキュメント

ドキュメント

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

日付 / バージョン
6.2.0 03/2024
pdf - 561 KB
日付 / バージョン
6.2.0 03/2024
pdf - 595 KB
ドキュメント

Technical Note P500T0002

Unpacking and Packing P-5xx Positioners

日付 / バージョン
2019-03-04
pdf - 448 KB
英語
ドキュメント

User Manual PZ248 (英語)

P-561, P-562, P-563 PIMars XYZ Nanopositioning Systems

日付 / バージョン
2.1.0 2023-11-20
pdf - 2 MB
日付 / バージョン
2.1.0 2023-11-20
pdf - 2 MB

3D モデル

3D モデル

P-56x 3-D model

zip - 3 MB

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