P-616.3C
Parallel-kinematic NanoCube® nanopositioner; 100 µm × 100 µm × 100 µm travel range (X × Y × Z); capacitive, direct position measuring; D-sub 25W3 (m); 1.5 m cable length
P-616 NanoCube® Nanopositioner
Compact Parallel-Kinematic Nanopositioner for Fiber Alignment and Scanning Microscopy
- Parallel-kinematic design for the highest stiffness in all spatial directions
- Highly dynamic motion due to high resonant frequencies even with loads up to 100 g
- Innovative product design for flexible use due to single mounting platform.
- Only nanopositioner available on the market with ID chip functionality
- Smallest and lightest NanoCube® with 100 µm travel range on the market
P-616.3C, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
P-616 NanoCube® Nanopositioner
製品の解説
仕様
ダウンロード
見積 / 発注
Application fields
- Fiber positioning and alignment
- Scanning microscopy
- 2-photon polymerization
- Nanotechnology and nanomanufacturing
- Photonics / integrated optics
- Micromanipulation
- Sample positioning
Outstanding lifetime thanks to PICMA® piezo actuators
The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
High dynamics multi-axis operation due to parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.
Specifications
Specifications
| Motion | P-616.3C | Tolerance |
|---|---|---|
| Active axes | X ǀ Y ǀ Z | |
| Travel range in X | 100 µm | |
| Travel range in Y | 100 µm | |
| Travel range in Z | 100 µm | |
| Travel range in X, open loop | 110 µm | ±20 % |
| Travel range in Y, open loop | 110 µm | ±20 % |
| Travel range in Z, open loop | 110 µm | ±20 % |
| Linearity error in X | 0.03 % | typ. |
| Linearity error in Y | 0.03 % | typ. |
| Linearity error in Z | 0.03 % | typ. |
| Positioning | P-616.3C | Tolerance |
| Bidirectional repeatability in X | 10 nm | typ. |
| Bidirectional repeatability in Y | 20 nm | typ. |
| Bidirectional repeatability in Z | 10 nm | typ. |
| Resolution in X, open loop | 0.3 nm | typ. |
| Resolution in Y, open loop | 0.3 nm | typ. |
| Resolution in Z, open loop | 0.3 nm | typ. |
| Integrated sensor | Capacitive, direct position measuring | |
| System resolution in X | 0.4 nm | |
| System resolution in Y | 0.4 nm | |
| System resolution in Z | 0.4 nm | |
| Drive Properties | P-616.3C | Tolerance |
| Drive type | PICMA® | |
| Electrical capacitance in X | 1.5 µF | ±20 % |
| Electrical capacitance in Y | 1.5 µF | ±20 % |
| Electrical capacitance in Z | 1.5 µF | ±20 % |
| Mechanical Properties | P-616.3C | Tolerance |
| Stiffness in X | 0.5 N/µm | ±20 % |
| Stiffness in Y | 0.5 N/µm | ±20 % |
| Stiffness in Z | 0.5 N/µm | ±20 % |
| Resonant frequency in X, unloaded | 700 Hz | ±20 % |
| Resonant frequency in X, under load with 38 g | 380 Hz | ±20 % |
| Resonant frequency in X, under load with 100 g | 250 Hz | ±20 % |
| Resonant frequency in Y, unloaded | 700 Hz | ±20 % |
| Resonant frequency in Y, under load with 38 g | 380 Hz | ±20 % |
| Resonant frequency in Y, under load with 100 g | 250 Hz | ±20 % |
| Resonant frequency in Z, unloaded | 700 Hz | ±20 % |
| Resonant frequency in Z, under load with 38 g | 380 Hz | ±20 % |
| Resonant frequency in Z, under load with 100 g | 250 Hz | ±20 % |
| Permissible push force in X | 15 N | max. |
| Permissible push force in Y | 15 N | max. |
| Permissible push force in Z | 15 N | max. |
| Permissible pull force in X | 9 N | max. |
| Permissible pull force in Y | 9 N | max. |
| Permissible pull force in Z | 9 N | max. |
| Permissible torque in θX | 0.4 N·m | max. |
| Permissible torque in θY | 0.4 N·m | max. |
| Permissible torque in θZ | 0.4 N·m | max. |
| Moved mass in X, unloaded | 21 g | |
| Moved mass in Y, unloaded | 21 g | |
| Moved mass in Z, unloaded | 21 g | |
| Guide | Flexure guide with lever amplification | |
| Overall mass | 400 g | |
| Mass without cable | 125 g | |
| Material | Aluminum, steel | |
| Miscellaneous | P-616.3C | Tolerance |
| Operating temperature range | -20 to 80 °C | |
| ID chip | Yes | |
| Connector | D-sub 25W3 (m) | |
| Cable length | 1.5 m | |
| Recommended controllers / drivers | E-503, E-663, E-712, E-727 |
The bidirectional repeatability refers to a 10% step and is a 1 sigma value.
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
Downloads
製品についての注意事項
製品についての注意事項
Product Change Notification Piezo Actuator Driven Products
日付 / バージョン
2021-04-19
pdf - 377 KB
英語
データシート
ドキュメント
ドキュメント
User Manual F603T0003
F-603.41 / F-603.42 / F-603.43 Fiber holders for P-616-type (NanoCube®) piezo positioners
日付 / バージョン
2018-12-03
pdf - 793 KB
英語
ドキュメント
User Manual PZ268
P-616 NanoCube® XYZ Nanopositioner
日付 / バージョン
2025-02-17
pdf - 3 MB
日付 / バージョン
2025-02-17
pdf - 3 MB
３D モデル
３D モデル
P-616.3C 3-D model
zip - 342 KB
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テクノロジー
PICMA® テクノロジー
特許取得済みの多層アクチュエータの製造技術は、高い信頼性と長寿命をお約束いたします。
真空
慎重な取り扱いと確かな根拠: PIは、原材料やコンポーネント、最終製品の品質保証に必要な設備だけでなく、長年にわたる高真空および超高真空ポジショニングシステムに関する経験を有しています。
フレクシャガイドシステム
PI社のフレクシャガイドは、ナノポジショニングの世界においてその価値を証明しています。フレクシャガイドはピエゾをガイドし、傾きや横方向へのズレがない直進性を保証します。
デジタルモーションコントローラ
デジタルテクノロジーにより、従来のアナログ技術にはなかった制御工学使い、パフォーマンスを改善する可能性があります。
静電容量センサ
静電容量センサは、もっとも要求事項の厳しいナノポジショニング用途に適した計測システムです。
パラレルキネマティックピエゾ位置決めシステム
パラレルキネマティック多軸システムでは、すべてのアクチュエータは、ただ一つの可動プラットフォームに対して、ダイレクトに動作します。