L-738 Precision XY Stage

Clear Aperture, High Travel Accuracy, and Stability

Travel range 102 mm × 102 mm (4")
Large aperture, 150 mm × 150 mm
Unidirectional repeatability to 0.025 µm
Velocity to 90 mm/s
2-phase stepper motors, DC motors
Incremental linear encoder with 1 nm resolution

L-738, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Optical reference and limit switches.

Recirculating ball bearings

When carefully assembled, recirculating ball bearings are distinguished by a beneficial combination of high load capacity, lifetime, and guiding accuracy.

Drive types

2-phase stepper motor for high torque even at low velocities and higher resolution
DC motor for high velocity constancy, low vibration, and high velocities

Application fields

Medical industry. Laser cutting. Biotechnology. Measuring technology. Microscopy.

データシートのダウンロード画面へ仕様へ

データシート

日付 / バージョン

2024-02-13

pdf - 614 KB

日付 / バージョン

2024-02-13

pdf - 612 KB

日付 / バージョン

2018-10-23

pdf - 799 KB

日付 / バージョン

2019-01-08

pdf - 770 KB

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Motion	L-738.051100	L-738.051111	L-738.051112	L-738.053111	L-738.053112	L-738.053132	Tolerance
Active axes	X	Y	X	Y	X	Y	X	Y	X	Y	X	Y
Travel range in X	102 mm	102 mm	102 mm	102 mm	102 mm	102 mm
Travel range in Y	102 mm	102 mm	102 mm	102 mm	102 mm	102 mm
Maximum velocity in X, unloaded	35 mm/s	35 mm/s	35 mm/s	50 mm/s	50 mm/s	90 mm/s
Maximum velocity in Y, unloaded	35 mm/s	35 mm/s	35 mm/s	50 mm/s	50 mm/s	90 mm/s
Orthogonality	± 96.96 µrad	± 96.96 µrad	± 96.96 µrad	± 96.96 µrad	± 96.96 µrad	± 96.96 µrad	typ.
Straightness (Linear crosstalk in X with motion in Y)	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	typ.
Straightness (Linear crosstalk in Y with motion in X)	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	typ.
Flatness (Linear crosstalk in Z with motion in X)	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	typ.
Flatness (Linear crosstalk in Z with motion in Y)	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	typ.
Pitch (Rotational crosstalk in θX with motion in Y)	± 40 µrad	± 40 µrad	± 40 µrad	± 40 µrad	± 40 µrad	± 40 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 40 µrad	± 40 µrad	± 40 µrad	± 40 µrad	± 40 µrad	± 40 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 20 µrad	± 20 µrad	± 20 µrad	± 20 µrad	± 20 µrad	± 20 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in Y)	± 20 µrad	± 20 µrad	± 20 µrad	± 20 µrad	± 20 µrad	± 20 µrad	typ.
Positioning	L-738.051100	L-738.051111	L-738.051112	L-738.053111	L-738.053112	L-738.053132	Tolerance
Minimum incremental motion in X	0.2 µm	0.05 µm	0.05 µm	0.1 µm	0.1 µm	0.4 µm	typ.
Minimum incremental motion in Y	0.2 µm	0.05 µm	0.05 µm	0.1 µm	0.1 µm	0.4 µm	typ.
Unidirectional repeatability in X	± 0.1 µm	± 0.025 µm	± 0.025 µm	± 0.05 µm	± 0.05 µm	± 0.2 µm	typ.
Unidirectional repeatability in Y	± 0.1 µm	± 0.025 µm	± 0.025 µm	± 0.05 µm	± 0.05 µm	± 0.2 µm	typ.
Bidirectional repeatability in X	4 µm	1 µm	1 µm	1 µm	1 µm	4 µm	typ.
Bidirectional repeatability in Y	4 µm	1 µm	1 µm	1 µm	1 µm	4 µm	typ.
Reference switch	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN
Reference switch repeatability	1 µm	1 µm	1 µm	1 µm	1 µm	1 µm
Limit switches	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN
Integrated sensor	—	Incremental linear encoder	Incremental linear encoder	Incremental linear encoder	Incremental linear encoder	—
Sensor signal	—	Sin/cos, 1 V peak-peak	A/B quadrature, RS-422	Sin/cos, 1 V peak-peak	A/B quadrature, RS-422	—
Sensor signal period	—	20 µm	—	20 µm	—	—
Sensor resolution	—	1 nm	10 nm	1 nm	10 nm	—
Motor encoder	—	—	—	—	—	Incremental rotary encoder
Motor encoder: Sensor signal	—	—	—	—	—	A/B quadrature, RS-422
Resolution, motor encoder	—	—	—	—	—	20000 Cts./rev.
Drive Properties	L-738.051100	L-738.051111	L-738.051112	L-738.053111	L-738.053112	L-738.053132	Tolerance
Drive type	2-phase stepper motor	2-phase stepper motor	2-phase stepper motor	DC motor	DC motor	DC motor
Nominal voltage	4 V	4 V	4 V	—	—	—
Nominal current, RMS	1.2 A	1.2 A	1.2 A	3.9 A	3.9 A	3.9 A	typ.
Motor resolution	200 Full steps/rev.	200 Full steps/rev.	200 Full steps/rev.	—	—	—
Drive force in X	100 N	100 N	100 N	100 N	100 N	100 N	typ.
Antriebskraft in X	100 N	100 N	100 N	100 N	100 N	100 N	typ.
Resistance phase-phase	3.3 Ω	3.3 Ω	3.3 Ω	0.62 Ω	0.62 Ω	0.62 Ω	typ.
Inductance phase-phase	2.8 mH	2.8 mH	2.8 mH	0.13 mH	0.13 mH	0.13 mH
Operating voltage	—	—	—	24 V	24 V	24 V
Torque constant	—	—	—	0.333 N·m/A	0.333 N·m/A	0.333 N·m/A	typ.
Back EMF, phase-phase, rotational	—	—	—	3.5 V/kRPM	3.5 V/kRPM	3.5 V/kRPM	max.
Number of pole pairs	—	—	—	1	1	1
Mechanical Properties	L-738.051100	L-738.051111	L-738.051112	L-738.053111	L-738.053112	L-738.053132	Tolerance
Permissible push force in Z	200 N	200 N	200 N	200 N	200 N	200 N	max.
Permissible torque in θX	130 N·m	130 N·m	130 N·m	130 N·m	130 N·m	130 N·m	max.
Permissible torque in θY	130 N·m	130 N·m	130 N·m	130 N·m	130 N·m	130 N·m	max.
Permissible torque in θZ	90 N·m	90 N·m	90 N·m	90 N·m	90 N·m	90 N·m	max.
Holding force in X, passive	60 N	60 N	60 N	20 N	20 N	20 N
Holding force in Y, passive	60 N	60 N	60 N	20 N	20 N	20 N
Moved mass in X, unloaded	13.8 g	13.8 g	13.8 g	14.6 g	14.6 g	14.6 g
Moved mass in Y, unloaded	5.8 g	5.8 g	5.8 g	5.8 g	5.8 g	5.8 g
Drive screw type	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw
Drive screw pitch	2 mm	2 mm	2 mm	2 mm	2 mm	2 mm
Guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide
Overall mass	22000 g	22000 g	22000 g	24000 g	24000 g	24000 g
Material	Aluminum, black anodized	Aluminum, black anodized	Aluminum, black anodized	Aluminum, black anodized	Aluminum, black anodized	Aluminum, black anodized
Miscellaneous	L-738.051100	L-738.051111	L-738.051112	L-738.053111	L-738.053112	L-738.053132	Tolerance
Operating temperature range	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C
Connector	2 × HD D-sub 26 (m)	2 × HD D-sub 26 (m)	2 × HD D-sub 26 (m)	2 × HD D-sub 26 (m)	2 × HD D-sub 26 (m)	2 × HD D-sub 26 (m)
Recommended controllers / drivers	G-901.R319 C-663.12, C-885 with C-663.12C885 ACS modular controller	G-901.R319 ACS modular controller	G-901.R319 C-663.12, C-885 with C-663.12C885 ACS modular controller	G-901.R319 C-891.130300, C-885 with C-891.11C885 ACS modular controller	G-901.R319 C-863, C-885 with C-863.20C885 C-884 ACS modular controller	G-901.R319 C-863, C-885 with C-863.20C885 C-884 ACS modular controller
Sensor connector	—	2 × D-sub 15 (f)	—	2 × D-sub 15 (f)	—	—

Note on nominal current, RMS: value per motor phase

データシートのダウンロード画面へダウンロード画面へ

データシート

日付 / バージョン

2024-02-13

pdf - 614 KB

日付 / バージョン

2024-02-13

pdf - 612 KB

日付 / バージョン

2018-10-23

pdf - 799 KB

日付 / バージョン

2019-01-08

pdf - 770 KB

ダウンロード

ドキュメント

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

日付 / バージョン

3.0.0 2024-01-15

pdf - 261 KB

日付 / バージョン

3.0.0 2024-01-15

pdf - 295 KB

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ドキュメント

L-738 / V-738 Precision XY Stage

日付 / バージョン

1.2.0 2024-01-18

pdf - 1 MB

日付 / バージョン

1.2.0 2024-01-18

pdf - 1 MB

３D モデル

日付 / バージョン

2018-07-16

zip - 9 MB

見積/発注へ

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

L-738.051100

Precision XY stage; 2-phase stepper motor; 102 mm × 102 mm travel range (X × Y); 200 N load capacity; 35 mm/s × 35 mm/s maximum velocity; ball screw

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L-738.051111

Precision XY stage; 2-phase stepper motor; 102 mm × 102 mm travel range (X × Y); 200 N load capacity; 35 mm/s × 35 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

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L-738.051112

Precision XY stage; 2-phase stepper motor; 102 mm x 102 mm travel range (X × Y); 200 N load capacity; 35 mm/s × 35 mm/s maximum velocity; ball screw; incremental linear encoder, 10 nm sensor resolution, A/B quadrature, RS-422

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L-738.053111

Precision XY stage; DC motor; 102 mm × 102 mm travel range (X × Y); 200 N load capacity; 50 mm/s × 50 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

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L-738.053112

Precision XY stage; DC motor; 102 mm x 102 mm travel range (X × Y); 200 N load capacity; 50 mm/s × 50 mm/s maximum velocity; ball screw; incremental linear encoder, 10 nm sensor resolution, A/B quadrature, RS-422

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L-738.053132

Precision XY stage; DC motor; 102 mm × 102 mm travel range (X × Y); 200 N load capacity; 90 mm/s × 90 mm/s maximum velocity; ball screw; incremental rotary encoder, 20000 counts/rev resolution, A/B quadrature, RS-422

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L-738 Precision XY Stage

Clear Aperture, High Travel Accuracy, and Stability

Specifications

Datasheet L-738

Specifications

Downloads

データシート

Datasheet L-738

ドキュメント

Short Instructions MP146EK

User Manual MP183

３D モデル

3-D model L-738

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