P-753 LISA Linear Actuator and Positioning Stage

Dynamic and Stable in Position

Guided stage and actuator at the same time
Travel range up to 38 µm
Resolution 0.1 nm
Particularly fast response behavior due to direct drive
Highest linearity due to capacitive sensors

P-753.1, dimensions in mm. Max. torque at the M2.5 threads: 0.3 Nm. Note that a comma is used in the drawings instead of a decimal point.

P-753.2, dimensions in mm. Max. torque at the M2.5 threads: 0.3 Nm. Note that a comma is used in the drawings instead of a decimal point.

P-753.3, dimensions in mm. Max. torque at the M2.5 threads: 0.3 Nm. Note that a comma is used in the drawings instead of a decimal point.

Application fields

Scanning microscopy
Measuring technology
Test procedures and quality assurance
Photonics
Fiber positioning

Outstanding lifetime due to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

Higher stiffness and dynamics due to PICMA® direct drive

Piezo nanopositioners with PICMA® direct drive have no mechanical translation. This allows fast response speeds as well as the highest possible stiffness and dynamics in the piezo drive range.

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データシート

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2023-12-11

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2023-12-11

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2019-01-14

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2019-04-01

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Motion	P-753.11C	P-753.1CD	P-753.21C	P-753.2CD	P-753.31C	P-753.3CD	Tolerance
Active axes	X	X	X	X	X	X
Travel range in X	15 µm	15 µm	30 µm	30 µm	38 µm	38 µm
Linearity error, closed loop	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 5 µrad	± 5 µrad	± 7 µrad	± 7 µrad	± 10 µrad	± 10 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 5 µrad	± 5 µrad	± 7 µrad	± 7 µrad	± 10 µrad	± 10 µrad	typ.
Positioning	P-753.11C	P-753.1CD	P-753.21C	P-753.2CD	P-753.31C	P-753.3CD	Tolerance
Integrated sensor	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring
System resolution in X	0.1 nm	0.1 nm	0.2 nm	0.2 nm	0.25 nm	0.25 nm
Drive Properties	P-753.11C	P-753.1CD	P-753.21C	P-753.2CD	P-753.31C	P-753.3CD	Tolerance
Drive type	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®
Electrical capacitance in X	1.5 µF	1.5 µF	3.1 µF	3.1 µF	4.6 µF	4.6 µF	±20 %
Mechanical Properties	P-753.11C	P-753.1CD	P-753.21C	P-753.2CD	P-753.31C	P-753.3CD	Tolerance
Stiffness in X	45 N/µm	45 N/µm	24 N/µm	24 N/µm	16 N/µm	16 N/µm	±20 %
Resonant frequency in X, unloaded	5600 Hz	5600 Hz	3700 Hz	3700 Hz	2900 Hz	2900 Hz	±20 %
Resonant frequency in X, under load with 200 g	2500 Hz	2500 Hz	1700 Hz	1700 Hz	1400 Hz	1400 Hz	±20 %
Permissible push force in X	100 N	100 N	100 N	100 N	100 N	100 N	max.
Permissible push force in Z	80 N	80 N	90 N	90 N	100 N	100 N	max.
Permissible pull force in X	20 N	20 N	20 N	20 N	20 N	20 N	max.
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification
Overall mass	160 g	160 g	215 g	215 g	260 g	260 g	±5 %
Material	Steel	Steel	Steel	Steel	Steel	Steel
Miscellaneous	P-753.11C	P-753.1CD	P-753.21C	P-753.2CD	P-753.31C	P-753.3CD	Tolerance
Operating temperature range	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C
Connector	LEMO LVPZT	D-sub 7W2 (m)	LEMO LVPZT	D-sub 7W2 (m)	LEMO LVPZT	D-sub 7W2 (m)
Sensor connector	LEMO for capacitive sensors		LEMO for capacitive sensors		LEMO for capacitive sensors
Cable length	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	+50 / -0 mm
Recommended controllers / drivers	E-625, E-709.1C1L, E-754	E-625, E-709.1C1L, E-754	E-625, E-709.1C1L, E-754	E-625, E-709.1C1L, E-754	E-625, E-709.1C1L, E-754	E-625, E-709.1C1L, E-754

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

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製品についての注意事項

日付 / バージョン

2021-04-19

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英語

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データシート

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2023-12-11

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