A-123.050A1
PIglide AT3 linear stage; air bearings; 50 mm travel range; incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period; ironless 3-phase linear motor, 48 V
A-123 PIglide AT3 Linear Stage with Air Bearings
High Performance Nanopositioning Stage
- Ideal for scanning applications or high-precision positioning
- Cleanroom compatible
- Size of the motion platform 210 mm × 210 mm
- Travel ranges 50 mm to 750 mm
- Resolution to 1 nm
A-123, dimensions in mm
A-123 PIglide AT3 Linear Stage with Air Bearings
製品の解説
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Product overview
The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.
A high-force linear motor can drive the stage to top speed within a few milliseconds, and the high-capacity bearings can support payloads up to 60 kg. The laterally opposed, actively preloaded air bearing design in this model allows mounting in any orientation.
Accessories and options
- Encoder
- PIglide Filter and Air Preparation Kits
- Single and multi-axis motion controller
- Pneumatic lock/unlock option
- XY setups and individual configurations
- Cable track variations
- Options with counterweight for vertical (Z) orientation
- Customizations available
- Base plates made of granite and systems for reducing vibration
Application fields
PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
Specifications
Specifications
Select a travel range:
| Motion | A-123.050A1 | A-123.050B1 | A-123.100A1 | A-123.100B1 | A-123.200A1 | A-123.200B1 | A-123.350A1 | A-123.350B1 | A-123.500A1 | A-123.500B1 | A-123.750A1 | A-123.750B1 | Tolerance |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Active axes | X | X | X | X | X | X | X | X | X | X | X | X | |
| Travel range in X | 50 mm | 50 mm | 100 mm | 100 mm | 200 mm | 200 mm | 350 mm | 350 mm | 500 mm | 500 mm | 750 mm | 750 mm | |
| Acceleration in X, unloaded | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | 30 m/s² | max. |
| Maximum velocity in X, unloaded | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | |
| Straightness error in Y (straightness) | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.5 µm | ± 0.5 µm | ± 0.75 µm | ± 0.75 µm | ± 1.5 µm | ± 1.5 µm | max. |
| Straightness error in Z (flatness) | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.5 µm | ± 0.5 µm | ± 0.75 µm | ± 0.75 µm | ± 1.5 µm | ± 1.5 µm | max. |
| Angular error around Y (pitch) | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 10 µrad | ± 10 µrad | ± 12.5 µrad | ± 12.5 µrad | max. |
| Angular error around Z (yaw) | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 10 µrad | ± 10 µrad | ± 12.5 µrad | ± 12.5 µrad | max. |
| Positioning | A-123.050A1 | A-123.050B1 | A-123.100A1 | A-123.100B1 | A-123.200A1 | A-123.200B1 | A-123.350A1 | A-123.350B1 | A-123.500A1 | A-123.500B1 | A-123.750A1 | A-123.750B1 | Tolerance |
| Positioning accuracy in X, calibrated | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.3 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | typ. |
| Positioning accuracy in X, uncalibrated | ± 1.5 µm | ± 1.5 µm | ± 1.5 µm | ± 1.5 µm | ± 2 µm | ± 1.5 µm | ± 3 µm | ± 1.5 µm | ± 3.5 µm | ± 1.5 µm | ± 5 µm | ± 1.5 µm | typ. |
| Bidirectional repeatability in X | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | typ. |
| Reference switch | Encoder index | — | Encoder index | — | Encoder index | — | Encoder index | — | Encoder index | — | Encoder index | — | |
| Limit switches | Hall effect | — | Hall effect | — | Hall effect | — | Hall effect | — | Hall effect | — | Hall effect | — | |
| Integrated sensor | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | |
| Sensor signal | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | |
| Sensor signal period | 20 µm | — | 20 µm | — | 20 µm | — | 20 µm | — | 20 µm | — | 20 µm | — | |
| Sensor resolution | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | |
| Drive Properties | A-123.050A1 | A-123.050B1 | A-123.100A1 | A-123.100B1 | A-123.200A1 | A-123.200B1 | A-123.350A1 | A-123.350B1 | A-123.500A1 | A-123.500B1 | A-123.750A1 | A-123.750B1 | Tolerance |
| Drive type | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | |
| Nominal voltage | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | |
| Peak voltage | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | |
| Nominal current, RMS | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | 4.4 A | typ. |
| Peak current, RMS | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | 15 A | typ. |
| Drive force in positive direction of motion in X | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | typ. |
| Drive force in negative direction of motion in X | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | 87.5 N | typ. |
| Peak force in positive direction of motion in X | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | |
| Peak force in negative direction of motion in X | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | 298 N | |
| Force constant | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | 19.9 N/A | |
| Resistance phase-phase | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | typ. |
| Inductance phase-phase | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | 1.2 mH | |
| Back EMF phase-phase | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | 16 V·s/m | max. |
| Pole pitch N-N | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | 30 mm | |
| Mechanical Properties | A-123.050A1 | A-123.050B1 | A-123.100A1 | A-123.100B1 | A-123.200A1 | A-123.200B1 | A-123.350A1 | A-123.350B1 | A-123.500A1 | A-123.500B1 | A-123.750A1 | A-123.750B1 | Tolerance |
| Permissible push force in Y | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | 205 N | max. |
| Permissible push force in Z | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | 410 N | max. |
| Permissible torque in θX | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | 25 N·m | max. |
| Permissible torque in θY | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | 10 N·m | max. |
| Moved mass in X, unloaded | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | 5000 g | |
| Guide | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | Air bearing with air preload | |
| Overall mass | 14000 g | 14000 g | 15500 g | 15500 g | 18000 g | 18000 g | 21500 g | 21500 g | 25000 g | 25000 g | 32000 g | 32000 g | |
| Material | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | Aluminum, stainless steel | |
| Miscellaneous | A-123.050A1 | A-123.050B1 | A-123.100A1 | A-123.100B1 | A-123.200A1 | A-123.200B1 | A-123.350A1 | A-123.350B1 | A-123.500A1 | A-123.500B1 | A-123.750A1 | A-123.750B1 | Tolerance |
| Operating temperature range | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | |
| Connector | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | |
| Sensor connector | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | |
| Operating pressure | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | |
| Air consumption | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | max. |
| Air quality | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 ǀ Oil free - ISO 8573–1 class 1 ǀ Dry (-15 °C dew point) - ISO 8573–1 class 3 | |
| Recommended controllers / drivers | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x |
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
Downloads
製品についての注意事項
製品についての注意事項
Product Change Notification A-xxx.*C1
日付 / バージョン
2018-08-02
pdf - 71 KB
英語
データシート
ドキュメント
ドキュメント
User Manual A123D0001
A-123 PIglide AT3 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback
日付 / バージョン
2021-05-17
pdf - 1 MB
英語
３D モデル
３D モデル
A-123 3-D model
日付 / バージョン
2020-04-13
zip - 22 MB
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A-123.050B1
PIglide AT3 linear stage; air bearings; 50 mm travel range; absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution; ironless 3-phase linear motor, 48 V
A-123.100A1
PIglide AT3 linear stage; air bearings; 100 mm travel range; incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period; ironless 3-phase linear motor, 48 V
A-123.100B1
PIglide AT3 linear stage; air bearings; 100 mm travel range; absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution; ironless 3-phase linear motor, 48 V
A-123.200A1
PIglide AT3 linear stage; air bearings; 200 mm travel range; incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period; ironless 3-phase linear motor, 48 V
A-123.200B1
PIglide AT3 linear stage; air bearings; 200 mm travel range; absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution; ironless 3-phase linear motor, 48 V
A-123.350A1
PIglide AT3 linear stage; air bearings; 350 mm travel range; incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period; ironless 3-phase linear motor, 48 V
A-123.350B1
PIglide AT3 linear stage; air bearings; 350 mm travel range; absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution; ironless 3-phase linear motor, 48 V
A-123.500A1
PIglide AT3 linear stage; air bearings; 500 mm travel range; incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period; ironless 3-phase linear motor, 48 V
A-123.500B1
PIglide AT3 linear stage; air bearings; 500 mm travel range; absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution; ironless 3-phase linear motor, 48 V
A-123.750A1
PIglide AT3 linear stage; air bearings; 750 mm travel range; incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period; ironless 3-phase linear motor, 48 V
A-123.750B1
PIglide AT3 linear stage; air bearings; 750 mm travel range; absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution; ironless 3-phase linear motor, 48 V
