A-141 PIglide MB Miniature Linear Stage with Air Bearings

High Performance, Cleanroom Compatible, Customizable

Size of the motion platform 57 mm × 93 mm
Low profile 38 mm
Travel ranges to 35 mm
Load capacity to 3 kg
Velocity to 0.25 m/s
Acceleration to 3.5 m/s²

A-141.035A1, dimensions in mm

Product overview

The PIglide MB linear stage with air bearing is equipped with a servo linear motor drive with preloaded air bearings and integrated optical linear encoder. This stage offers ultra-precision in miniature format. The combination of the noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.

Accessories and options

PIglide Filter and Air Preparation Kits
Single and multi-axis motion controller
Base plates made of granite and systems for reducing vibration

Application fields

The stage is ideally suited for many high precision applications, such as metrology, photonics alignment, optics positioning, and scanning. The noncontact design also is ideal for cleanroom applications. Electrical cables are not moved. The air bearing module offers a locking design for the ultimate in position stability.

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データシート

日付 / バージョン

2023-11-17

pdf - 710 KB

日付 / バージョン

2023-11-17

pdf - 715 KB

日付 / バージョン

2021-01-15

pdf - 420 KB

ダウンロード

Motion	A-141.035A1	Tolerance
Active axes	X
Travel range in X	35 mm
Acceleration in X, unloaded	3.5 m/s²	max.
Maximum velocity in X, unloaded	250 mm/s
Straightness (Linear crosstalk in Y with motion in X)	± 0.1 µm	max.
Flatness (Linear crosstalk in Z with motion in X)	± 0.1 µm	max.
Roll (Rotational crosstalk in θX with motion in X)	± 5 µrad	max.
Pitch (Rotational crosstalk in θY with motion in X)	± 5 µrad	max.
Yaw (Rotational crosstalk in θZ with motion in X)	± 5 µrad	max.
Positioning	A-141.035A1	Tolerance
Positioning accuracy in X, calibrated	± 0.2 µm	typ.
Positioning accuracy in X, uncalibrated	± 2 µm	typ.
Bidirectional repeatability in X	0.1 µm	typ.
Reference switch	Encoder index
Limit switches	Hall effect
Integrated sensor	Incremental linear encoder
Sensor signal	Sin/cos, 1 V peak-peak
Sensor signal period	20 µm
Sensor resolution	4.88 nm
Drive Properties	A-141.035A1	Tolerance
Drive type	Ironless 3-phase linear motor
Nominal voltage	48 V
Peak voltage	80 V
Nominal current, RMS	0.3 A	typ.
Peak current, RMS	1.1 A	typ.
Drive force in X	0.58 N	typ.
Peak force in X	2.3 N
Force constant	2.1 N/A
Resistance phase-phase	22.4 Ω	typ.
Inductance phase-phase	1 mH
Back EMF phase-phase	0.7 V·s/m	max.
Pole pitch N-N	18 mm
Mechanical Properties	A-141.035A1	Tolerance
Permissible push force in Z	30 N	max.
Permissible torque in θx	1.1 N·m	max.
Permissible torque in θY	2.8 N·m	max.
Moved mass in X, unloaded	300 g
Guide	Air bearing guide with air preload
Overall mass	600 g
Material	Hardcoat aluminum, stainless steel mounting hardware
Miscellaneous	A-141.035A1	Tolerance
Operating temperature range	+15 to +25 °C
Connector	D-sub 9W4 (m)
Sensor connector	D-sub 15-pin (m)
Operating pressure	445 to 515 (65 to 75 psi) kPa
Air consumption	28 L/min	max.
Air quality	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3
Cable length	0.45 m
Recommended controllers / drivers	A-81x, A-82x

データシートのダウンロード画面へダウンロード画面へ

データシート

日付 / バージョン

2023-11-17

pdf - 710 KB

日付 / バージョン

2023-11-17

pdf - 715 KB

日付 / バージョン

2021-01-15

pdf - 420 KB

ダウンロード

ドキュメント

A-141 Series Miniature Linear Air Bearing Stage

日付 / バージョン

2020-03-26

pdf - 1 MB

英語

３D モデル

zip - 1 MB

見積/発注へ

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

A-141.035A1

PIglide MB miniature linear stage with air bearing; ironless 3-phase linear motor; 35 mm travel range; 30 N load capacity; 250 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak; 0.45 m cable length

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