P-611.3O
NanoCube® XYZ nanopositioner; 120 µm × 120 µm × 120 µm travel range (open loop) (X × Y × Z); without sensor; D-sub 25 (m) connector; 1.5 m cable length
P-611.3 NanoCube® XYZ Nanopositioner
Compact Multi-Axis Piezo Positioner for Nanopositioning and Fiber Alignment
- Travel range up to 120 µm × 120 µm × 120 µm
- Ultracompact: 44 mm × 44 mm × 44 mm
- Resolution to 0.2 nm
- Fast response behavior
- Zero-play and highly accurate flexure guides
- Outstanding lifetime thanks to PICMA® piezo actuators
- For fast scanning
- Version with integrated fiber holder
- Particularly inexpensive systems
P-611.3 NanoCube® XYZ Nanopositioner
製品の解説
仕様
ダウンロード
見積 / 発注
Application fields
- Photonics / integrated optics
- Micromanipulation
- Biotechnology
- Semiconductor tests
- Fiber positioning
Outstanding lifetime due to PICMA® piezo actuators
The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Specifications
Specifications
| Motion | P-611.3O | P-611.3OF | P-611.3S | P-611.3SF | Tolerance |
|---|---|---|---|---|---|
| Active axes | X Y Z | X Y Z | X Y Z | X Y Z | |
| Travel range in X, open loop, at -20 to 120 V | 120 µm | 120 µm | 120 µm | 120 µm | +20 / -0 % |
| Travel range in Y, open loop, at -20 to +120 V | 120 µm | 120 µm | 120 µm | 120 µm | +20 / -0 % |
| Travel range in Z, open loop, at -20 to 120 V | 120 µm | 120 µm | 120 µm | 120 µm | +20 / -0 % |
| Pitch (Rotational crosstalk in θX with motion in Y) | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 5 µrad | typ. |
| Yaw (Rotational crosstalk in θX with motion in Z) | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | typ. |
| Pitch (Rotational crosstalk in θY with motion in X) | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 5 µrad | typ. |
| Pitch (Rotational crosstalk in θY with motion in Z) | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | typ. |
| Yaw (Rotational crosstalk in θZ with motion in X) | ± 20 µrad | ± 20 µrad | ± 20 µrad | ± 20 µrad | typ. |
| Yaw (Rotational crosstalk in θZ with motion in Y) | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | typ. |
| Travel range in X | 100 µm | 100 µm | |||
| Travel range in Y | 100 µm | 100 µm | |||
| Travel range in Z | 100 µm | 100 µm | |||
| Linearity error | 0.1 % | 0.1 % | typ. | ||
| Positioning | P-611.3O | P-611.3OF | P-611.3S | P-611.3SF | Tolerance |
| Resolution in X, open loop | 0.2 nm | 0.2 nm | 0.2 nm | 0.2 nm | typ. |
| Resolution in Y, open loop | 0.2 nm | 0.2 nm | 0.2 nm | 0.2 nm | typ. |
| Resolution in Z, open loop | 0.2 nm | 0.2 nm | 0.2 nm | 0.2 nm | typ. |
| Unidirectional repeatability in X | ± 10 nm | ± 10 nm | typ. | ||
| Unidirectional repeatability in Y | ± 10 nm | ± 10 nm | typ. | ||
| Unidirectional repeatability in Z | ± 10 nm | ± 10 nm | typ. | ||
| Integrated sensor | SGS, direct position measuring | SGS, direct position measuring | |||
| System resolution in X | 1 nm | 1 nm | |||
| System resolution in Y | 1 nm | 1 nm | |||
| System resolution in Z | 1 nm | 1 nm | |||
| Drive Properties | P-611.3O | P-611.3OF | P-611.3S | P-611.3SF | Tolerance |
| Drive type | PICMA® | PICMA® | PICMA® | PICMA® | |
| Electrical capacitance | 1,5 µF | 1,5 µF | 1,5 µF | 1,5 µF | ±20 % |
| Mechanical Properties | P-611.3O | P-611.3OF | P-611.3S | P-611.3SF | Tolerance |
| Stiffness | 0.3 N/µm | 0.3 N/µm | 0.3 N/µm | 0.3 N/µm | ±20 % |
| Resonant frequency in X, unloaded | 350 Hz | 350 Hz | 350 Hz | 350 Hz | ±20 % |
| Resonant frequency in X, under load with 30 g | 270 Hz | 270 Hz | 270 Hz | 270 Hz | ±20 % |
| Resonant frequency in X, under load with 100 g | 180 Hz | 180 Hz | 180 Hz | 180 Hz | ±20 % |
| Resonant frequency in Y, unloaded | 220 Hz | 220 Hz | 220 Hz | 220 Hz | ±20 % |
| Resonant frequency in Y, under load with 30 g | 185 Hz | 185 Hz | 185 Hz | 185 Hz | ±20 % |
| Resonant frequency in Y, under load with 100 g | 135 Hz | 135 Hz | 135 Hz | 135 Hz | ±20 % |
| Resonant frequency in Z, unloaded | 250 Hz | 250 Hz | 250 Hz | 250 Hz | ±20 % |
| Resonant frequency in Z, under load with 30 g | 230 Hz | 230 Hz | 230 Hz | 230 Hz | ±20 % |
| Resonant frequency in Z, under load with 100 g | 200 Hz | 200 Hz | 200 Hz | 200 Hz | ±20 % |
| Permissible push force in X | 15 N | 15 N | 15 N | 15 N | max. |
| Permissible push force in Y | 15 N | 15 N | 15 N | 15 N | max. |
| Permissible push force in Z | 15 N | 15 N | 15 N | 15 N | max. |
| Permissible pull force in X | 10 N | 10 N | 10 N | 10 N | max. |
| Permissible pull force in Y | 10 N | 10 N | 10 N | 10 N | max. |
| Permissible pull force in Z | 10 N | 10 N | 10 N | 10 N | max. |
| Guide | Flexure guide with lever amplification | Flexure guide with lever amplification | Flexure guide with lever amplification | Flexure guide with lever amplification | |
| Overall mass | 320 g | 320 g | 320 g | 320 g | ±5 % |
| Material | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | |
| Miscellaneous | P-611.3O | P-611.3OF | P-611.3S | P-611.3SF | Tolerance |
| Operating temperature range | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | |
| Connector | D-sub 25-pin (m) | D-sub 25-pin (m) | D-sub 25-pin (m) | D-sub 25-pin (m) | |
| Cable length | 1.5 m | 1.5 m | 1.5 m | 1.5 m | ±10 mm |
| Recommended controllers / drivers | E-503, E-505, E-663, E-664, E-727 | E-503, E-505, E-663, E-664, E-727 | E-503, E-505, E-663, E-664, E-727 | E-503, E-505, E-663, E-664, E-727 | |
| Sensor connector | D-sub 25-pin (m) | D-sub 25-pin (m) |
The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
Adapter cables with LEMO connectors for sensor and operating voltage available.
Downloads
製品についての注意事項
製品についての注意事項
Product Change Notification Piezo Actuator Driven Products
日付 / バージョン
2021-04-19
pdf - 377 KB
英語
データシート
ドキュメント
ドキュメント
User Manual PZ253 (英語)
P-611 Nanopositioning Systems with Strain Gauge Sensors / without Sensor
日付 / バージョン
1.2.2 2022-08-24
pdf - 3 MB
日付 / バージョン
1.2.2 2022-08-24
pdf - 3 MB
ドキュメント
Unpacking Instructions P611T0006
Unpacking and Handling of P-611 Positioners
日付 / バージョン
2018-01-24
pdf - 768 KB
英語
３D モデル
３D モデル
P-611.3x 3-D model
zip - 187 KB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
P-611.3OF
NanoCube® XYZ nanopositioner; 120 µm × 120 µm × 120 µm travel range (open loop) (X × Y × Z); without sensor; integrated fiber holder; D-sub 25 (m) connector; 1.5 m cable length
P-611.3S
NanoCube® XYZ nanopositioner; 100 µm × 100 µm × 100 µm travel range (X × Y × Z); SGS, direct position measuring; D-sub 25 (m) connector; 1.5 m cable length
P-611.3SF
NanoCube® XYZ nanopositioner; 100 µm × 100 µm × 100 µm travel range (X × Y × Z); SGS, direct position measuring; integrated fiber holder; D-sub 25 (m) connector; 1.5 m cable length
