High-precision XY Nanopositioners with Variable Travel Ranges

Travel ranges 50 to 1800 µm
Resolution to 0.1 nm
Positioning accuracy 0.02 %
Direct position measuring with capacitive sensors
X, XY, Z, XYZ versions

P-62x.2CD/.2CL/.20L, dimensions in mm.

Application fields

Interferometry
Microscopy
Nanopositioning
Biotechnology
Test procedures and quality assurance
Photonics
Fiber positioning
Semiconductor technology

Outstanding lifetime due to PICMA^® piezo actuators

The PICMA^® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA^® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

データシートのダウンロード画面へ仕様へ

データシート

日付 / バージョン

2023-12-12

pdf - 731 KB

日付 / バージョン

2023-12-12

pdf - 769 KB

日付 / バージョン

2018-05-17

pdf - 773 KB

日付 / バージョン

2018-07-03

pdf - 859 KB

ダウンロード

Select a travel range:

Click inside the table and use your arrow keys to scroll left or right.

Motion	P-620.20L	P-620.2CD	P-620.2CL	P-621.20L	P-621.2CD	P-621.2CL	P-622.20L	P-622.2CD	P-622.2CL	P-625.20L	P-625.2CD	P-625.2CL	P-628.20L	P-628.2CD	P-628.2CL	P-629.2CD	P-629.2CL	Tolerance
Active axes	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y
Travel range in X, open loop	60 µm	60 µm	60 µm	120 µm	120 µm	120 µm	300 µm	300 µm	300 µm	600 µm	600 µm	600 µm	1000 µm	1000 µm	1000 µm	1800 µm	1800 µm	±20 %
Travel range in Y, open loop	60 µm	60 µm	60 µm	120 µm	120 µm	120 µm	300 µm	300 µm	300 µm	600 µm	600 µm	600 µm	1000 µm	1000 µm	1000 µm	1800 µm	1800 µm	±20 %
Pitch (Rotational crosstalk in θX with motion in Y)	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 20 µrad	± 20 µrad	± 20 µrad	± 30 µrad	± 30 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 20 µrad	± 20 µrad	± 20 µrad	± 30 µrad	± 30 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in Y)	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	typ.
Travel range in X		50 µm	50 µm		100 µm	100 µm		250 µm	250 µm		500 µm	500 µm		800 µm	800 µm	1500 µm	1500 µm
Travel range in Y		50 µm	50 µm		100 µm	100 µm		250 µm	250 µm		500 µm	500 µm		800 µm	800 µm	1500 µm	1500 µm
Linearity error in X		0.02 %	0.02 %		0.02 %	0.02 %		0.02 %	0.02 %		0.03 %	0.03 %		0.03 %	0.03 %	0.03 %	0.03 %	typ.
Linearity error in Y		0.02 %	0.02 %		0.02 %	0.02 %		0.02 %	0.02 %		0.03 %	0.03 %		0.03 %	0.03 %	0.03 %	0.03 %	typ.
Positioning	P-620.20L	P-620.2CD	P-620.2CL	P-621.20L	P-621.2CD	P-621.2CL	P-622.20L	P-622.2CD	P-622.2CL	P-625.20L	P-625.2CD	P-625.2CL	P-628.20L	P-628.2CD	P-628.2CL	P-629.2CD	P-629.2CL	Tolerance
Resolution in X, open loop	0.1 nm	0.1 nm	0.1 nm	0.2 nm	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.4 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	2 nm	2 nm	typ.
Resolution in Y, open loop	0.1 nm	0.1 nm	0.1 nm	0.2 nm	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.4 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	2 nm	2 nm	typ.
Bidirectional repeatability in X		2 nm	2 nm		2 nm	2 nm		2 nm	2 nm		5 nm	5 nm		10 nm	10 nm	14 nm	14 nm	typ.
Bidirectional repeatability in Y		2 nm	2 nm		2 nm	2 nm		2 nm	2 nm		5 nm	5 nm		10 nm	10 nm	14 nm	14 nm	typ.
Integrated sensor		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring
System resolution in X		0.2 nm	0.2 nm		0.4 nm	0.4 nm		0.7 nm	0.7 nm		1.4 nm	1.4 nm		3.5 nm	3.5 nm	3.5 nm	3.5 nm
System resolution in Y		0.2 nm	0.2 nm		0.4 nm	0.4 nm		0.7 nm	0.7 nm		1.4 nm	1.4 nm		3.5 nm	3.5 nm	3.5 nm	3.5 nm
Drive Properties	P-620.20L	P-620.2CD	P-620.2CL	P-621.20L	P-621.2CD	P-621.2CL	P-622.20L	P-622.2CD	P-622.2CL	P-625.20L	P-625.2CD	P-625.2CL	P-628.20L	P-628.2CD	P-628.2CL	P-629.2CD	P-629.2CL	Tolerance
Drive type	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®
Maximum power consumption	2 W	2 W	2 W	6 W	6 W	6 W	7 W	7 W	7 W	9 W	9 W	9 W	15 W	15 W	15 W	38 W	38 W
Electrical capacitance in X	0.35 µF	0.35 µF	0.35 µF	1.5 µF	1.5 µF	1.5 µF	3.1 µF	3.1 µF	3.1 µF	6.2 µF	6.2 µF	6.2 µF	19 µF	19 µF	19 µF	52 µF	52 µF	±20 %
Electrical capacitance in Y	0.35 µF	0.35 µF	0.35 µF	1.5 µF	1.5 µF	1.5 µF	3.1 µF	3.1 µF	3.1 µF	6.2 µF	6.2 µF	6.2 µF	19 µF	19 µF	19 µF	52 µF	52 µF	±20 %
Short-term maximum operating frequency	267 Hz	267 Hz	267 Hz	178 Hz	178 Hz	178 Hz	100 Hz	100 Hz	100 Hz	65 Hz	65 Hz	65 Hz	35 Hz	35 Hz	35 Hz	33 Hz	33 Hz
Mechanical Properties	P-620.20L	P-620.2CD	P-620.2CL	P-621.20L	P-621.2CD	P-621.2CL	P-622.20L	P-622.2CD	P-622.2CL	P-625.20L	P-625.2CD	P-625.2CL	P-628.20L	P-628.2CD	P-628.2CL	P-629.2CD	P-629.2CL	Tolerance
Stiffness in X	0.22 N/µm	0.22 N/µm	0.22 N/µm	0.25 N/µm	0.25 N/µm	0.25 N/µm	0.2 N/µm	0.2 N/µm	0.2 N/µm	0.1 N/µm	0.1 N/µm	0.1 N/µm	0.05 N/µm	0.05 N/µm	0.05 N/µm	0.1 N/µm	0.1 N/µm	±20 %
Stiffness in Y	0.22 N/µm	0.22 N/µm	0.22 N/µm	0.25 N/µm	0.25 N/µm	0.25 N/µm	0.2 N/µm	0.2 N/µm	0.2 N/µm	0.1 N/µm	0.1 N/µm	0.1 N/µm	0.05 N/µm	0.05 N/µm	0.05 N/µm	0.1 N/µm	0.1 N/µm	±20 %
Resonant frequency in X, unloaded	575 Hz	575 Hz	575 Hz	420 Hz	420 Hz	420 Hz	225 Hz	225 Hz	225 Hz	135 Hz	135 Hz	135 Hz	75 Hz	75 Hz	75 Hz	60 Hz	60 Hz	±20 %
Resonant frequency in X, under load with 50 g	285 Hz	285 Hz	285 Hz	285 Hz	285 Hz	285 Hz	180 Hz	180 Hz	180 Hz	120 Hz	120 Hz	120 Hz	60 Hz	60 Hz	60 Hz	55 Hz	55 Hz	±20 %
Resonant frequency in X, under load with 100 g	270 Hz	270 Hz	270 Hz	220 Hz	220 Hz	220 Hz	160 Hz	160 Hz	160 Hz	105 Hz	105 Hz	105 Hz	55 Hz	55 Hz	55 Hz	50 Hz	50 Hz	±20 %
Resonant frequency in Y, unloaded	800 Hz	800 Hz	800 Hz	535 Hz	535 Hz	535 Hz	300 Hz	300 Hz	300 Hz	195 Hz	195 Hz	195 Hz	105 Hz	105 Hz	105 Hz	100 Hz	100 Hz	±20 %
Resonant frequency in Y, under load with 50 g	395 Hz	395 Hz	395 Hz	365 Hz	365 Hz	365 Hz	215 Hz	215 Hz	215 Hz	150 Hz	150 Hz	150 Hz	85 Hz	85 Hz	85 Hz	85 Hz	85 Hz	±20 %
Resonant frequency in Y, under load with 100 g	300 Hz	300 Hz	300 Hz	285 Hz	285 Hz	285 Hz	175 Hz	175 Hz	175 Hz	125 Hz	125 Hz	125 Hz	75 Hz	75 Hz	75 Hz	80 Hz	80 Hz	±20 %
Permissible push force in X	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	max.
Permissible push force in Y	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	max.
Permissible push force in Z	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	max.
Permissible pull force in X	5 N	5 N	5 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	max.
Permissible pull force in Y	5 N	5 N	5 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	8 N	max.
Permissible pull force in Z	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	max.
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification
Overall mass	195 g	195 g	195 g	295 g	295 g	295 g	348 g	348 g	348 g	430 g	430 g	430 g	700 g	700 g	700 g	1370 g	1370 g
Material	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum
Miscellaneous	P-620.20L	P-620.2CD	P-620.2CL	P-621.20L	P-621.2CD	P-621.2CL	P-622.20L	P-622.2CD	P-622.2CL	P-625.20L	P-625.2CD	P-625.2CL	P-628.20L	P-628.2CD	P-628.2CL	P-629.2CD	P-629.2CL	Tolerance
Operating temperature range	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C
Connector	LEMO LVPZT	2 × D-sub 7W2 (m)	LEMO LVPZT	LEMO LVPZT	2 × D-sub 7W2 (m)	LEMO LVPZT	LEMO LVPZT	2 × D-sub 7W2 (m)	LEMO LVPZT	LEMO LVPZT	2 × D-sub 7W2 (m)	LEMO LVPZT	LEMO LVPZT	2 × D-sub 7W2 (m)	LEMO LVPZT	2 × D-sub 7W2 (m)	LEMO LVPZT
Cable length	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m
Recommended controllers / drivers	E-503, E-505, E-663	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-663	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-663	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-663	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-663	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727
Sensor connector			LEMO for capacitive sensors			LEMO for capacitive sensors			LEMO for capacitive sensors			LEMO for capacitive sensors			LEMO for capacitive sensors		LEMO for capacitive sensors

P-628.2CD / P-628.2CL: Linearity error in X, Y (typ.) 0.03 % with digital controller. With analog controllers 0.05 %.

P-629.2CD / P-629.2CL: Linearity error in X, Y (typ.) 0.03 % with digital controller. With analog controllers 0.08 %.

X: lower axis; Y: upper axis.

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

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製品についての注意事項

日付 / バージョン

2021-04-19

pdf - 377 KB

英語

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データシート

日付 / バージョン

2023-12-12

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日付 / バージョン

2023-12-12

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日付 / バージョン

2018-05-17

pdf - 773 KB

日付 / バージョン

2018-07-03

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ドキュメント

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

日付 / バージョン

6.2.0 03/2024

pdf - 561 KB

日付 / バージョン

6.2.0 03/2024

pdf - 595 KB

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ドキュメント

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors

日付 / バージョン

1.3.0 2021-11-03

pdf - 3 MB

日付 / バージョン

1.3.0 2021-11-03

pdf - 3 MB

３D モデル

zip - 1,011 KB

見積/発注へ

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

P-620.20L

PIHera precision XY nanopositioner, 60 µm × 60 µm, without sensors, LEMO connectors

Specifications

Datasheet P-620.2 – P-629.2 (英語)

Specifications

Downloads

製品についての注意事項

Product Change Notification Piezo Actuator Driven Products

データシート

Datasheet P-620.2 – P-629.2 (英語)

ドキュメント

Short Instructions PZ240

User Manual PZ234 (英語)

３D モデル

P-62x.2 STEP

Quote / Order

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