P-612.Z Piezo Z Stage

Compact Nanopositioner with Aperture

Travel range 100 µm
Resolution to 0.2 nm
Linearity error 0.2 %
Compact: Surface 60 mm × 60 mm
Particularly inexpensive systems (mechanics and controller)
Zero-play, high-precision flexure guide system
Outstanding lifetime due to PICMA® piezo actuators

見積 / 発注

With active control, the settling time is less than 10 ms over the entire travel range.

P-612.ZSL, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Application fields

Interferometry
Microscopy
Nanopositioning
Biotechnology
Test procedures and quality assurance
Semiconductor technology

Outstanding lifetime thanks to PICMA^® piezo actuators

The PICMA^® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA^® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

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データシート

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2024-01-09

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2024-01-09

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2018-06-14

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2018-07-12

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Motion	P-612.ZSL	Tolerance
Active axes	Z
Travel range in Z	100 µm
Travel range in Z, open loop, at -20 to 120 V	110 µm	+20 / -0 %
Linearity error in Z	0.2 %	typ.
Flatness (Linear crosstalk in X with motion in Z)	± 20 nm	typ.
Straightness (Linear crosstalk in Y with motion in Z)	± 20 nm	typ.
Yaw (Rotational crosstalk in θX with motion in Z)	± 10 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in Z)	± 10 µrad	typ.
Positioning	P-612.ZSL	Tolerance
Unidirectional repeatability in Z	± 4 nm	typ.
Resolution in Z, open loop	0.2 nm	typ.
Integrated sensor	SGS, indirect position measuring
System resolution in Z	1.5 nm
Drive Properties	P-612.ZSL	Tolerance
Drive type	PICMA®
Electrical capacitance in Z	3 µF	±20 %
Mechanical Properties	P-612.ZSL	Tolerance
Stiffness in Z	0.63 N/µm	±20 %
Resonant frequency in Z, unloaded	490 Hz	±20 %
Resonant frequency in Z, under load with 30 g	420 Hz	±20 %
Permissible push force in Z	15 N	max.
Permissible pull force in Z	10 N	max.
Guide	Flexure guide with lever amplification
Overall mass	280 g	±5 %
Material	Aluminum
Miscellaneous	P-612.ZSL	Tolerance
Operating temperature range	-20 to 80 °C
Connector	LEMO FFS.00.250.CTCE24
Sensor connector	LEMO FFA.0S.304.CLAC32
Cable length	1.5 m	±10 mm
Recommended controllers / drivers	E-503, E-505, E-610, E-621, E-625, E-665

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

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製品についての注意事項

日付 / バージョン

2021-04-19

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英語

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データシート

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2024-01-09

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