Reference-class 6-axis positioning system
Parallel-kinematic design for six degrees of freedom, making it significantly more compact and stiff than serial-kinematic systems, higher dynamics, no moved cables: Higher reliability, reduced friction. suitable for vacuum environments to 10-6 hPa.
Brushless DC Motor (BLDC)
Brushless DC motors are particularly suitable for high rotational speeds. They can be controlled very accurately and ensure high precision. Because they dispense with sliding contacts, they run smoothly, are wear-free and therefore achieve a long lifetime.
PIVirtualMove
The simulation software simulates the limits of the workspace and load capacity of a hexapod. Therefore, even before purchasing, you can check whether a particular hexapod model can handle the loads, forces, and torques occurring in an application. For this purpose, the simulation tool takes the position and motion of the hexapod as well as the pivot point and several reference coordinate systems into account.
Application fields
Industry and research, micromanufacturing, medical technology, tool inspection.
| Motion | H-811.I2V | Tolerance |
|---|---|---|
| Active axes | X ǀ Y ǀ Z ǀ θX ǀ θY ǀ θZ | |
| Travel range in X | ± 17 mm | |
| Travel range in Y | ± 16 mm | |
| Travel range in Z | ± 6.5 mm | |
| Rotation range in θX | ± 10 ° | |
| Rotation range in θY | ± 10 ° | |
| Rotation range in θZ | ± 21 ° | |
| Maximum velocity in X | 10 mm/s | |
| Maximum velocity in Y | 10 mm/s | |
| Maximum velocity in Z | 10 mm/s | |
| Maximum angular velocity in θX | 250 mrad/s | |
| Maximum angular velocity in θY | 250 mrad/s | |
| Maximum angular velocity in θZ | 250 mrad/s | |
| Typical velocity in X | 5 mm/s | |
| Typical velocity in Y | 5 mm/s | |
| Typical velocity in Z | 5 mm/s | |
| Typical angular velocity in θX | 120 mrad/s | |
| Typical angular velocity in θY | 120 mrad/s | |
| Typical angular velocity in θZ | 120 mrad/s | |
| Positioning | H-811.I2V | Tolerance |
| Minimum incremental motion in X | 0.2 µm | typ. |
| Minimum incremental motion in Y | 0.2 µm | typ. |
| Minimum incremental motion in Z | 0.08 µm | typ. |
| Minimum incremental motion in θX | 2.5 µrad | typ. |
| Minimum incremental motion in θY | 2.5 µrad | typ. |
| Minimum incremental motion in θZ | 5 µrad | typ. |
| Unidirectional repeatability in X | ± 0.15 µm | typ. |
| Unidirectional repeatability in Y | ± 0.15 µm | typ. |
| Unidirectional repeatability in Z | ± 0.06 µm | typ. |
| Unidirectional repeatability in θX | ± 2 µrad | typ. |
| Unidirectional repeatability in θY | ± 2 µrad | typ. |
| Unidirectional repeatability in θZ | ± 3 µrad | typ. |
| Backlash in X | 0.2 µm | typ. |
| Backlash in Y | 0.2 µm | typ. |
| Backlash in Z | 0.06 µm | typ. |
| Backlash in θX | 2 µrad | typ. |
| Backlash in θY | 2 µrad | typ. |
| Backlash in θZ | 4 µrad | typ. |
| Drive Properties | H-811.I2V | Tolerance |
| Drive type | Brushless DC motor | |
| Mechanical Properties | H-811.I2V | Tolerance |
| Stiffness in X | 0.7 N/µm | |
| Stiffness in Y | 0.7 N/µm | |
| Stiffness in Z | 8 N/µm | |
| Maximum load capacity, base plate in any orientation | 2.5 kg | |
| Maximum load capacity, base plate horizontal | 5 kg | |
| Maximum holding force, base plate in any orientation | 2.5 N | |
| Maximum holding force, base plate horizontal | 15 N | |
| Overall mass | 2.2 kg | |
| Material | Stainless steel, aluminum | |
| Miscellaneous | H-811.I2V | Tolerance |
| Operating temperature range | 0 to 50 °C | |
| Vacuum class | 10⁻⁶ ǀ hPa | |
| Maximum bakeout temperature | 80 °C | |
| Connector for data transmission | HD D-sub 78 (m) | |
| Connector for supply voltage | LEMO | |
| Cable length | 2 m | |
| Outer diameter power supply cable | 4.7 mm | |
| Minimum bending radius for fixed installation, power supply | 50 mm | |
| Outer diameter data transmission cable | 6.6 mm | |
| Minimum bending radius for fixed installation, data transmission | 70 mm | |
| Recommended controllers / drivers | C-887.5x |
Technical data specified at 22±3 °C.
The maximum travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis shows its maximum travel range when all other axes are in the zero position of the nominal travel range and the default coordinate system is in use, or rather when the pivot point is set to 0,0,0.
For continuous operation in a vacuum, restrictions on operating parameters may be necessary due to heat generation.
The cables fixed to the H-811.I2V are not drag chain compatible.
Note on outer diameter data transmission cable: The data transmission connection consists of 2 cables that end in one connector. The specified diameter applies for each cable.
Air-side connecting cables are not included in the scope of delivery and must be ordered separately.
H-811.I2, H-811.I2V, H-811.F2, and H-811.S2 miniature hexapods
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Miniature hexapod microrobot, brushless DC motor, vacuum compatible to 10-6hPa, 5 kg load capacity, 10 mm/s velocity, cable set 2 m on the vacuum side, feedthroughs. Air-side connecting cables are not included in the scope of delivery and must be ordered separately.
担当者よりお問合せにつきまして、すぐにご連絡をさせて頂きます。
PIでは、EtherCATスレーブとして使用できる高精度のドライブを提供するほか、マスターや既存のアーキテクチャの第2マスターとして、ACSモーションコントローラーをそのドライブと一体化させることもできます。
慎重な取り扱いと確かな根拠: PIは、原材料やコンポーネント、最終製品の品質保証に必要な設備だけでなく、長年にわたる高真空および超高真空ポジショニングシステムに関する経験を有しています。
モーションシミュレータ（加振器）には高いモーションダイナミクス仕様が求められます。
ヘキサポッドプラットフォームは、搭載物の６軸方向、つまり3つの直動軸と3つの回転軸に沿った高精度位置決め、および搭載物の位置調整のために使用されます。
パラレルキネマティック多軸システムでは、すべてのアクチュエータは、ただ一つの可動プラットフォームに対して、ダイレクトに動作します。
パラレルキネマティック多軸システムでは、すべてのアクチュエータは単一の可動プラットフォームに作用します。 これは、すべての軸を全く同じ動的特性であるとして設計できることを意味します。結果として、運動する質量を大きく減らせることが出来ます。ヘキサポッドは、6軸方向（3つの直進軸と3つの回転軸）に移動および高精度の位置決めに使用されます。
At Diamond Light Source, UK, beamline I07 is a high-resolution X-ray diffraction beamline dedicated to investigate the structure of surfaces and interfaces.
ハンブルクにあるDESYのP05イメージングビームラインは、HZGによって運用されています。
Investigation of the structural properties of thin films under high-vacuum conditions.
Sample Manipulators in High-Vacuum
