The hexapods suitable for vacuum of the H-850 series position loads of up to 80 kg with high precision and reliability. Heavy-duty precision bearings allow applications with long duty cycles. The H-850.V are suitable for vacuum environments to 10-6 hPa.
The parallel-kinematic design for 6 degrees of freedom makes it significantly more compact and stiffer than comparable serial kinematic systems. The advantages over serial, i.e., stacked systems, are mainly the much better path accuracy and repeatability. In addition, the moved mass is lower and allows improved dynamics which is the same for all motion axes. Cable management is not a problem because cables are not moved.
PIVirtualMove
The simulation software simulates the limits of the workspace and payload of a hexapod. Therefore, even before purchasing, you can check whether a particular hexapod model can handle the loads, forces, and torques occurring in an application. For this purpose, the simulation tool takes the position and motion of the hexapod as well as the pivot point and several reference coordinate systems into account.
Application fields
Industry and research. For astronomy, optics positioning, aerospace.
| Motion | H-850.G2V | H-850.H2V | Tolerance |
|---|---|---|---|
| Active axes | X ǀ Y ǀ Z ǀ θX ǀ θY ǀ θZ | X ǀ Y ǀ Z ǀ θX ǀ θY ǀ θZ | |
| Travel range in X | ± 50 mm | ± 50 mm | |
| Travel range in Y | ± 50 mm | ± 50 mm | |
| Travel range in Z | ± 25 mm | ± 25 mm | |
| Rotation range in θX | ± 15 ° | ± 15 ° | |
| Rotation range in θY | ± 15 ° | ± 15 ° | |
| Rotation range in θZ | ± 30 ° | ± 30 ° | |
| Maximum velocity in X | 2.5 mm/s | 0.15 mm/s | |
| Recommended velocity in X | 2 mm/s | 0.1 mm/s | |
| Maximum velocity in Y | 2.5 mm/s | 0.15 mm/s | |
| Recommended velocity in Y | 2 mm/s | 0.1 mm/s | |
| Maximum velocity in Z | 2.5 mm/s | 0.15 mm/s | |
| Recommended velocity in Z | 2 mm/s | 0.1 mm/s | |
| Maximum angular velocity in θX | 30 mrad/s | 1.8 mrad/s | |
| Recommended angular velocity in θX | 25 mrad/s | 1.2 mrad/s | |
| Maximum angular velocity in θY | 30 mrad/s | 1.8 mrad/s | |
| Recommended angular velocity in θY | 25 mrad/s | 1.2 mrad/s | |
| Maximum angular velocity in θZ | 30 mrad/s | 1.8 mrad/s | |
| Recommended angular velocity in θZ | 25 mrad/s | 1.2 mrad/s | |
| Positioning | H-850.G2V | H-850.H2V | Tolerance |
| Minimum incremental motion in X | 1 µm | 0.3 µm | typ. |
| Minimum incremental motion in Y | 1 µm | 0.3 µm | typ. |
| Minimum incremental motion in Z | 0.5 µm | 0.2 µm | typ. |
| Minimum incremental motion in θX | 7.5 µrad | 3 µrad | typ. |
| Minimum incremental motion in θY | 7.5 µrad | 3 µrad | typ. |
| Minimum incremental motion in θZ | 15 µrad | 5 µrad | typ. |
| Unidirectional repeatability in X | ± 0.5 µm | ± 0.5 µm | typ. |
| Unidirectional repeatability in Y | ± 0.5 µm | ± 0.5 µm | typ. |
| Unidirectional repeatability in Z | ± 0.2 µm | ± 0.2 µm | typ. |
| Unidirectional repeatability in θX | ± 3 µrad | ± 3 µrad | typ. |
| Unidirectional repeatability in θY | ± 3 µrad | ± 3 µrad | typ. |
| Unidirectional repeatability in θZ | ± 7.5 µrad | ± 9 µrad | typ. |
| Backlash in X | 8 µm | 8 µm | typ. |
| Backlash in Y | 8 µm | 8 µm | typ. |
| Backlash in Z | 1.5 µm | 1 µm | typ. |
| Backlash in θX | 25 µrad | 7.5 µrad | typ. |
| Backlash in θY | 25 µrad | 7.5 µrad | typ. |
| Backlash in θZ | 90 µrad | 60 µrad | typ. |
| Integrated sensor | Incremental rotary encoder | Incremental rotary encoder | |
| Drive Properties | H-850.G2V | H-850.H2V | Tolerance |
| Drive type | DC gear motor with ActiveDrive | DC gear motor with ActiveDrive | |
| Nominal voltage | 24 V | 24 V | |
| Mechanical Properties | H-850.G2V | H-850.H2V | Tolerance |
| Stiffness in X | 7 N/µm | 7 N/µm | |
| Stiffness in Y | 7 N/µm | 7 N/µm | |
| Stiffness in Z | 100 N/µm | 100 N/µm | |
| Maximum load capacity, base plate horizontal | 25 kg | 80 kg | |
| Maximum load capacity, base plate in any orientation | 10 kg | 40 kg | |
| Maximum holding force, base plate horizontal | 250 N | 2000 N | |
| Maximum holding force, base plate in any orientation | 85 N | 500 N | |
| Drive screw type | Ball screw | Ball screw | |
| Overall mass | 17 kg | 17 kg | |
| Material | Aluminum | Aluminum | |
| Miscellaneous | H-850.G2V | H-850.H2V | Tolerance |
| Operating temperature range | -10 to 50 °C | -10 to 50 °C | |
| Vacuum class | 10⁻⁶ ǀ hPa | 10⁻⁶ ǀ hPa | |
| Maximum bakeout temperature | 80 °C | 80 °C | |
| Connector for data transmission | HD D-sub 78 (m) | HD D-sub 78 (m) | |
| Connector for supply voltage | M12 4-pole (m) | M12 4-pole (m) | |
| Cable length | 2 m | 2 m | |
| Recommended controllers/drivers | C-887.5xx | C-887.5xx |
Air-side connecting cables are not included in the scope of delivery and must be ordered separately.
With continuous operation in a vacuum, heat generation may necessitate limiting the operating parameters.
When measuring position specifications, typical velocity is used. The data is included in the delivery of the product in the form of a measurement report and is stored at PI.
The maximum travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis shows its maximum travel range when all other axes are in the zero position of the nominal travel range and the default coordinate system is in use, or rather when the pivot point is set to 0,0,0.
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
H-850 Hexapod Microrobot with Excellent Position Repeatability
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Precision Hexapod; DC gear motor; rotary encoder; 25 kg payload; 2.5 mm/s maximum velocity; vacuum compatible to 10-6 hPa; cable set 2 m vacuum side; feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately.
Precision Hexapod; DC gear motor; rotary encoder; 80 kg payload; 0.15 mm/s maximum velocity; vacuum compatible to 10-6 hPa; cable set 2 m vacuum side; feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately.
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PIでは、EtherCATスレーブとして使用できる高精度のドライブを提供するほか、マスターや既存のアーキテクチャの第2マスターとして、ACSモーションコントローラーをそのドライブと一体化させることもできます。
慎重な取り扱いと確かな根拠: PIは、原材料やコンポーネント、最終製品の品質保証に必要な設備だけでなく、長年にわたる高真空および超高真空ポジショニングシステムに関する経験を有しています。
ヘキサポッドプラットフォームは、搭載物の６軸方向、つまり3つの直動軸と3つの回転軸に沿った高精度位置決め、および搭載物の位置調整のために使用されます。
At Diamond Light Source, UK, beamline I07 is a high-resolution X-ray diffraction beamline dedicated to investigate the structure of surfaces and interfaces.
ハンブルクにあるDESYのP05イメージングビームラインは、HZGによって運用されています。
Positioning the Vacuum Chamber for X-ray Diffraction Experiment
Sample Manipulators in High-Vacuum
