Precision-class 6-axis positioning system
Parallel-kinematic design for six degrees of freedom, making it significantly more compact and stiff than serial-kinematic systems, higher dynamics, no moved cables: Higher reliability, reduced friction. suitable for vacuum environments to 10-6 hPa.
Compact due to folded drive design
PIVirtualMove
The simulation software simulates the limits of the workspace and load capacity of a hexapod. Therefore, even before purchasing, you can check whether a particular hexapod model can handle the loads, forces, and torques occurring in an application. For this purpose, the simulation tool takes the position and motion of the hexapod as well as the pivot point and several reference coordinate systems into account.
Application fields
Industry and research. For micromanipulation, biotechnology, semiconductor manufacturing
| Motion | H-824.D2V | H-824.G2V | Tolerance |
|---|---|---|---|
| Active axes | X ǀ Y ǀ Z ǀ θX ǀ θY ǀ θZ | X ǀ Y ǀ Z ǀ θX ǀ θY ǀ θZ | |
| Travel range in X | ± 22.5 mm | ± 22.5 mm | |
| Travel range in Y | ± 22.5 mm | ± 22.5 mm | |
| Travel range in Z | ± 12.5 mm | ± 12.5 mm | |
| Rotation range in θX | ± 7.5 ° | ± 7.5 ° | |
| Rotation range in θY | ± 7.5 ° | ± 7.5 ° | |
| Rotation range in θZ | ± 12.5 ° | ± 12.5 ° | |
| Maximum velocity in X | 12.5 mm/s | 0.5 mm/s | |
| Maximum velocity in Y | 12.5 mm/s | 0.5 mm/s | |
| Maximum velocity in Z | 12.5 mm/s | 0.5 mm/s | |
| Maximum angular velocity in θX | 135 mrad/s | 5.5 mrad/s | |
| Maximum angular velocity in θY | 135 mrad/s | 5.5 mrad/s | |
| Maximum angular velocity in θZ | 135 mrad/s | 5.5 mrad/s | |
| Typical velocity in X | 5 mm/s | 0.2 mm/s | |
| Typical velocity in Y | 5 mm/s | 0.2 mm/s | |
| Typical velocity in Z | 5 mm/s | 0.2 mm/s | |
| Typical angular velocity in θX | 28 mrad/s | 2.3 mrad/s | |
| Typical angular velocity in θY | 28 mrad/s | 2.3 mrad/s | |
| Typical angular velocity in θZ | 28 mrad/s | 2.3 mrad/s | |
| Positioning | H-824.D2V | H-824.G2V | Tolerance |
| Minimum incremental motion in X | 2 µm | 0.3 µm | typ. |
| Minimum incremental motion in Y | 2 µm | 0.3 µm | typ. |
| Minimum incremental motion in Z | 1 µm | 0.3 µm | typ. |
| Minimum incremental motion in θX | 12 µrad | 3.5 µrad | typ. |
| Minimum incremental motion in θY | 12 µrad | 3.5 µrad | typ. |
| Minimum incremental motion in θZ | 14 µrad | 3.5 µrad | typ. |
| Unidirectional repeatability in X | ± 0.5 µm | ± 0.4 µm | typ. |
| Unidirectional repeatability in Y | ± 0.5 µm | ± 0.4 µm | typ. |
| Unidirectional repeatability in Z | ± 0.15 µm | ± 0.1 µm | typ. |
| Unidirectional repeatability in θX | ± 3 µrad | ± 2 µrad | typ. |
| Unidirectional repeatability in θY | ± 3 µrad | ± 2 µrad | typ. |
| Unidirectional repeatability in θZ | ± 2.5 µrad | ± 3 µrad | typ. |
| Backlash in X | 3 µm | 5 µm | typ. |
| Backlash in Y | 3 µm | 5 µm | typ. |
| Backlash in Z | 1.5 µm | 1.5 µm | typ. |
| Backlash in θX | 20 µrad | 30 µrad | typ. |
| Backlash in θY | 20 µrad | 30 µrad | typ. |
| Backlash in θZ | 60 µrad | 45 µrad | typ. |
| Drive Properties | H-824.D2V | H-824.G2V | Tolerance |
| Drive type | DC motor | DC gear motor | |
| Nominal voltage | 24 V | 24 V | |
| Mechanical Properties | H-824.D2V | H-824.G2V | Tolerance |
| Stiffness in X | 1.7 N/µm | 1.7 N/µm | |
| Stiffness in Y | 1.7 N/µm | 1.7 N/µm | |
| Stiffness in Z | 7 N/µm | 7 N/µm | |
| Maximum load capacity, base plate in any orientation | 1.25 kg | 2.5 kg | |
| Maximum load capacity, base plate horizontal | 2.5 kg | 5 kg | |
| Maximum holding force, base plate in any orientation | 5 N | 25 N | |
| Maximum holding force, base plate horizontal | 15 N | 50 N | |
| Overall mass | 8 kg | 8 kg | |
| Material | Aluminum | Aluminum | |
| Miscellaneous | H-824.D2V | H-824.G2V | Tolerance |
| Operating temperature range | -10 to 50 °C | -10 to 50 °C | |
| Vacuum class | 10⁻⁶ ǀ hPa | 10⁻⁶ ǀ hPa | |
| Maximum bakeout temperature | 80 °C | 80 °C | |
| Connector for data transmission | HD D-sub 78 (m) | HD D-sub 78 (m) | |
| Connector for supply voltage | LEMO | LEMO | |
| Cable length | 2 m | 2 m | |
| Recommended controllers / drivers | C-887.5x | C-887.5x |
Technical data specified at 22±3 °C.
The maximum travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis shows its maximum travel range when all other axes are in the zero position of the nominal travel range and the default coordinate system is in use, or rather when the pivot point is set to 0,0,0.
For continuous operation in a vacuum, restrictions on operating parameters may be necessary due to heat generation.
Air-side connecting cables are not included in the scope of delivery and must be ordered separately.
Ask about customized versions.
H-824 Compact Microrobot
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Compact hexapod microrobot, direct drive, 12.5 mm/s, 2.5 kg load, vacuum-compatible to 10-6 hPa, D-sub connector, cable set 2 m vacuum side, feedthrough. Air-side connecting cables are not included in the scope of delivery and must be ordered separately.
Compact hexapod microrobot, gearhead, 0.5 mm/s, 5 kg load, vacuum-compatible to 10-6 hPa, D-sub connector, cable set 2 m vacuum side, feedthrough. Air-side connecting cables are not included in the scope of delivery and must be ordered separately.
担当者よりお問合せにつきまして、すぐにご連絡をさせて頂きます。
PIでは、EtherCATスレーブとして使用できる高精度のドライブを提供するほか、マスターや既存のアーキテクチャの第2マスターとして、ACSモーションコントローラーをそのドライブと一体化させることもできます。
慎重な取り扱いと確かな根拠: PIは、原材料やコンポーネント、最終製品の品質保証に必要な設備だけでなく、長年にわたる高真空および超高真空ポジショニングシステムに関する経験を有しています。
ヘキサポッドプラットフォームは、搭載物の６軸方向、つまり3つの直動軸と3つの回転軸に沿った高精度位置決め、および搭載物の位置調整のために使用されます。
At Diamond Light Source, UK, beamline I07 is a high-resolution X-ray diffraction beamline dedicated to investigate the structure of surfaces and interfaces.
ハンブルクにあるDESYのP05イメージングビームラインは、HZGによって運用されています。
Sample Manipulators in High-Vacuum
