P-911KNMV UHV-Compatible Miniature Piezo Hexapod

High-Precision Positioning Even in Strong Magnetic Fields

P-911KNMV UHV-Compatible Miniature Piezo Hexapod
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  • Ultra-compact
  • UHV-compatible to 10-9 hPa
  • Nonmagnetic
  • Ultra-high precision flexure joints
  • Load capacity to 1.5 kg
  • Travel ranges to 1.5 mm, to 2°
  • With NEXLINE® piezo stepping drives

The space-saving parallel-kinematic design allows for the low overall height of less than 90 mm and a diameter of only 100 mm. NEXLINE® piezo stepping motor drives and integrated incremental sensors ensure a position resolution down to 0.1 µm in the linear axes


Datasheet P-911KNMV




Datasheet P-911KNMV


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Non-Magnetic, UHV-Compatible Hexapod with NEXLINE® Piezo Stepping Drives, incl. Controller