E-713.xCDx Motion Controller for Piezo Actuators

Coordination of motion

The E-713 Motion Controller supports piezo nanopositioning systems with capacitive sensors and coordinates motion for up to 6 logical axes. Depending on the controller model, axis motion is based on up to 8 piezo channels and 6 sensor channels. Users can easily command axis motions as the controller handles conversion between axis-related and channel-related values.

Integration of analog signals

Depending on the model, 4 high-resolution analog inputs and outputs with high bandwidth are available. Users can configure each of the analog inputs and outputs for various purposes, for example, as a control input or monitor output. Digital linearization of the inputs via fourth-order polynomials and filtering for reduced signal noise make possible applications requiring extremely high precision.

Analysis and automation

The flexibly configurable data recorder can be used to record operating data such as motor control, velocity, position, or position error. Execution of macros on the controller facilitates standalone operation.

Fast periodic motion

The integrated wave generator can save periodic motion profiles and output them. During fast periodic motion, such as that typical for scanning applications, it is possible to increase tracking accuracy through optional dynamic digital linearization (DDL) by up to three orders of magnitude.

Extensive software assistance

PIMikroMove user software enables fast startup with no programming skills needed as well as graphic depiction of signals and operations. Furthermore, there is an extensive set of drivers available, e.g., for use with C, C++, C#, NI LabVIEW, or MATLAB.

Scope of delivery

The scope of delivery includes the controller and a software package. It is recommended to order the parallel kinematics and the controller together so that the components can be adapted to each other.

Application fields

Industry and research. Semiconductor manufacturing and inspection.