A-688.A100 新製品!
PIglide RLA rotation stage, air bearing, 365 mm motion platform diameter, 260 mm diameter aperture, low profile, incremental angle measuring system with sin/cos signal transmission, brushless 3-phase torque motor
新製品
A-68x PIglide RLA Rotation Stage with Air Bearings, Large Aperture
Friction-free, Motorized
- 365 mm diameter motion platform, 260 mm diameter aperture
- Low profile
- Eccentricity and flatness < 300 nm
A-688.A100
A-688, dimensions in mm
A-68x PIglide RLA Rotation Stage with Air Bearings, Large Aperture
製品の解説
仕様
ダウンロード
見積 / 発注
Product overview
The directly driven flat rotation stages of the PIglide RLA series are designed for the highest precision. They have a low profile and a large clear aperture. The RLA stages offer a superior travel accuracy, flatness, and wobble performance.
3-Phase torque motor
- Brushless
- Low cogging torque
Absolute encoder (optional)
Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.
Accessories and options
- Incremental or absolute encoder
- PIglide filter and air preparation kit
- Single or multi-axis motion controllers and servo drives
- Multi-axis/customized setups
- Base plates made of granite and systems for reducing vibration
Application fields
Tomography, beamline systems, wafer metrology, wafer inspection, measuring technology, inspection systems, calibration, scanning.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
Specifications
Specifications
Drive properties | A-688 | Unit | Tolerance |
|---|---|---|---|
Drive type | Torque motor, 3-phase, brushless | ||
Intermediate circuit voltage | 48, nominal 80, max. | V DC | |
Peak current | 6.9 | A | Max. |
Nominal current | 3.2 | A | Max. |
Peak torque | 85 | Nm | Max. |
Nominal torque | 39 | Nm | Max. |
Torque constant | 12.3 | Nm/A | Typ. |
Resistance phase-phase | 3.6 | Ω | Typ. |
Inductance phase-phase | 1.24 | mH | Typ. |
Back EMF phase-phase | 10.1 | V/kRPM | Typ. |
Positioning | A-688.A100 | A-688.B100 |
|---|---|---|
Integrated sensor | Incremental angle-measuring system | Absolute angle-measuring system |
Sensor signal | Sin/cos, 1 V peak-peak | BiSS-C |
Lines/revolution | 55040 | – |
Velocity (3) | 500 rpm max. | 500 rpm max. |
Sensor resolution | 0.03 µrad (4) | 0.0015 µrad |
Bidirectional repeatability | ± 4 µrad | ± 4 µrad |
Accuracy, with error compensation (5) | ± 8 µrad | ± 8 µrad |
Reference switch | 1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak | – |
Miscellaneous | A-688 |
|---|---|
Operating pressure (6) | 75 to 85 psi (515 to 585 kPa) |
Air consumption | < 2 SCFM (56 SLPM) |
Air quality | Clean (filtered to 1.0 μm or better) - ISO 8573‑1 Class 1 Oil free - ISO 8573‑1 Class 1 Dry (-15 °C dew point) - ISO 8573‑1 Class 3 |
Materials | Hardcoat aluminum, stainless steel mounting hardware |
(1) Dependent on the quality of the underlying surface, the payload, orientation, and forces that act on the stage from the outside. Please contact PI for application-specific parameters. The specified values are static (no rotary motion during measuring) and without load.
(2)The loads listed assume a supply pressure of 550 kPa (80 psi). Please contact PI if other pressures are required.
(3)May be limited by the payload, payload imbalance, controller or drive.
(4) Assumes 4096x interpolation. Contact PI for the use of other factors.
(5) The specified values are based on error compensation controlled by the controller. The stage must be ordered with an A-8xx series controller from PI to reach these values. Accuracy values assume short duration and do not consider the long-term effects of thermal drift on the stage.
(6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.
Downloads
データシート
ドキュメント
ドキュメント
User Manual A688D0001
A-688 Series Large Clear Aperture Rotary Air Bearing Stage
日付 / バージョン
1.0 / 2020-04-01
pdf - 983 KB
英語
３D モデル
３D モデル
3-D model A-68x
日付 / バージョン
2020-04-01
zip - 2 MB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
A-688.B100 新製品!
PIglide RLA rotation stage, air bearing, 365 mm motion platform diameter, 260 mm diameter aperture, low profile, absolute angle-measuring system with BiSS-C signal transmission, brushless 3-phase torque motor
