A-68x PIglide RLA Rotation Stage with Air Bearings, Large Aperture
Friction-free, Motorized
- 365 mm diameter motion platform, 260 mm diameter aperture
- Low profile
- Eccentricity and flatness < 300 nm
Product overview
The directly driven flat rotation stages of the PIglide RLA series are designed for the highest precision. They have a low profile and a large clear aperture. The RLA stages offer a superior travel accuracy, flatness, and wobble performance.
3-Phase torque motor
- Brushless
- Low cogging torque
Absolute encoder (optional)
Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.
Accessories and options
- Incremental or absolute encoder
- PIglide filter and air preparation kit
- Single or multi-axis motion controllers and servo drives
- Multi-axis/customized setups
- Base plates made of granite and systems for reducing vibration
Application fields
Tomography, beamline systems, wafer metrology, wafer inspection, measuring technology, inspection systems, calibration, scanning.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
Specifications
Specifications
Drive properties | A-688 | Unit | Tolerance |
---|---|---|---|
Drive type | Torque motor, 3-phase, brushless | ||
Intermediate circuit voltage | 48, nominal 80, max. | V DC | |
Peak current | 6.9 | A | Max. |
Nominal current | 3.2 | A | Max. |
Peak torque | 85 | Nm | Max. |
Nominal torque | 39 | Nm | Max. |
Torque constant | 12.3 | Nm/A | Typ. |
Resistance phase-phase | 3.6 | Ω | Typ. |
Inductance phase-phase | 1.24 | mH | Typ. |
Back EMF phase-phase | 10.1 | V/kRPM | Typ. |
Positioning | A-688.A100 | A-688.B100 |
---|---|---|
Integrated sensor | Incremental angle-measuring system | Absolute angle-measuring system |
Sensor signal | Sin/cos, 1 V peak-peak | BiSS-C |
Lines/revolution | 55040 | – |
Velocity (3) | 500 rpm max. | 500 rpm max. |
Sensor resolution | 0.03 µrad (4) | 0.0015 µrad |
Bidirectional repeatability | ± 4 µrad | ± 4 µrad |
Accuracy, with error compensation (5) | ± 8 µrad | ± 8 µrad |
Reference switch | 1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak | – |
Miscellaneous | A-688 |
---|---|
Operating pressure (6) | 75 to 85 psi (515 to 585 kPa) |
Air consumption | < 2 SCFM (56 SLPM) |
Air quality | Clean (filtered to 1.0 μm or better) - ISO 8573‑1 Class 1 Oil free - ISO 8573‑1 Class 1 Dry (-15 °C dew point) - ISO 8573‑1 Class 3 |
Materials | Hardcoat aluminum, stainless steel mounting hardware |
Downloads
データシート
ドキュメント
User Manual A688D0001
A-688 Series Large Clear Aperture Rotary Air Bearing Stage
3D モデル
3-D model A-68x
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