L-611.991200V6
Vacuum-compatible precision rotation stage; 2-phase stepper motor; 360 ° rotational angle; 100 N load capacity; 20 °/s maximum angular velocity; vacuum compatible to 10⁻⁶ hPa
L-611 V6 • V7 • V9 Precision Rotation Stage Suitable for Vacuum
High Travel Accuracy
- Vacuum compatible up to 10-9 hPa
- Unlimited travel range
- Very high resolution
- Stepper motor
- Direction-sensing reference switch
- Multi-axis setups possible
L-611 rotation stage with 2-phase stepper motor
Direction of the axes and torques for rotation stages
L-611.991200V6, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
L-611.991300V7, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
L-611.991600V9, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
L-611 V6 • V7 • V9 Precision Rotation Stage Suitable for Vacuum
製品の解説
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Reference-class rotation stage
High-precision positioning due to low-play preloaded worm gear. Preloaded pivot bearings for high travel accuracy. Clear aperture with 35 mm Ø. Unlimited travel range in both directions of rotation. Reference switch.
Reduced outgassing especially for use in vacuum environments
Most notably, for the lubrication of the guides and the spindle a material with particularly low outgassing is used. This allows a bakeout temperature of up to 80° C. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6hPa.
Higher quality for applications in high vacuum
In this case, special components suitable for high vacuum are used, such as motor, measuring system, and limit switches. In addition, the surface is made of uncoated aluminum and the spindles and guides are made of stainless steel. With this, the PI V7 vacuum class is reached, which means up to 10-7 hPa.
The highest quality for special requirements in ultrahigh vacuum
In this vacuum class, the product is optimized in all details thanks to components suitable for ultrahigh vacuum in order to reach PI V9 vacuum class up to 10-9hPa. Among other things, only selected types of plastic are used for this purpose and bakeout temperatures of 120 °C with measuring system, respectively 150 °C without measuring system are applied.
Option: Measurement of the travel accuracy and positioning accuracy
Individual measurement logs available on request for wobble, axial, and radial creep. Please specify when ordering.
Application fields
Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.
Specifications
Specifications
| Motion | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 | Tolerance |
|---|---|---|---|---|
| Active axes | θZ | θZ | θZ | |
| Rotation range in θZ | 360 ° | 360 ° | 360 ° | |
| Maximum angular velocity in θZ, unloaded | 20 °/s | 20 °/s | 20 °/s | |
| Linear crosstalk in X with motion in θZ | ± 2.5 µm | ± 2.5 µm | ± 2.5 µm | typ. |
| Linear crosstalk in Y with motion in θZ | ± 2.5 µm | ± 2.5 µm | ± 2.5 µm | typ. |
| Linear crosstalk in Z with motion in θZ | ± 1 µm | ± 1 µm | ± 1 µm | typ. |
| Rotational crosstalk in θX with motion in θZ | ± 15 µrad | ± 15 µrad | ± 15 µrad | typ. |
| Rotational crosstalk in θY with motion in θZ | ± 15 µrad | ± 15 µrad | ± 15 µrad | typ. |
| Positioning | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 | Tolerance |
| Unidirectional repeatability in θZ | 20 µrad | 20 µrad | 20 µrad | typ. |
| Bidirectional repeatability in θZ | ± 175 µrad | ± 175 µrad | ± 175 µrad | typ. |
| Minimum incremental motion in θZ | 8.72 µrad | 8.72 µrad | 8.72 µrad | typ. |
| Reference switch | Hall effect, N/C contact, 5 V, NPN | Hall effect, N/C contact, 5 V, NPN | Hall effect, N/C contact, 5 V, NPN | |
| Drive Properties | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 | Tolerance |
| Drive type | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | |
| Motor resolution | 200 Full steps/rev. | 200 Full steps/rev. | 200 Full steps/rev. | |
| Nominal voltage | 24 V | 24 V | 24 V | |
| Peak voltage | 48 V | 48 V | 48 V | |
| Nominal current, RMS | 1.2 A | 1.2 A | 1.2 A | typ. |
| Resistance phase-phase | 3.3 Ω | 3.3 Ω | 3.3 Ω | typ. |
| Inductance phase-phase | 2.8 mH | 2.8 mH | 2.8 mH | |
| Mechanical Properties | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 | Tolerance |
| Bearing type | Ball bearings | Ball bearings | Ball bearings | |
| Worm gear reduction | 90 : 1 | 90 : 1 | 90 : 1 | |
| Moved mass in θZ, unloaded | 1100 g | 1100 g | 1100 g | |
| Moment of inertia in θZ, unloaded | 770 kg·mm² | 770 kg·mm² | 770 kg·mm² | ±20 % |
| Permissible push force in X | 50 N | 50 N | 50 N | max. |
| Permissible push force in Y | 50 N | 50 N | 50 N | max. |
| Permissible push force in Z | 100 N | 100 N | 100 N | max. |
| Permissible pull force in X | 50 N | 50 N | 50 N | max. |
| Permissible pull force in Y | 50 N | 50 N | 50 N | max. |
| Permissible pull force in Z | 100 N | 100 N | 100 N | max. |
| Permissible torque in θx | 40 N·m | 40 N·m | 40 N·m | max. |
| Permissible torque in θY | 40 N·m | 40 N·m | 40 N·m | max. |
| Permissible torque in θZ | 3 N·m | 3 N·m | 3 N·m | max. |
| Overall mass | 2600 g | 2600 g | 2600 g | |
| Material | Aluminum, anodized, stainless steel, red bronze | Aluminum, anodized, stainless steel, red bronze | Aluminum, anodized, stainless steel, red bronze | |
| Miscellaneous | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 | Tolerance |
| Operating temperature range | 5 to 40 °C | 5 to 40 °C | 5 to 40 °C | |
| Connector | HD D-sub 26-pin (m) | D-sub 15-pole (f) | D-sub 15-pole (f) | |
| Recommended controllers / drivers | C-663.12 C-885 with C-663.12C885 ACS modular controller | C-663.12 C-885 with C-663.12C885 ACS modular controller | C-663.12 C-885 with C-663.12C885 ACS modular controller | |
| Vacuum class | 10⁻⁶ hPa | 10⁻⁷ hPa | 10⁻⁹ hPa | |
| Cable length | 2 m | 2 m |
Note on cable length: Fixed cable, firmly attached to the product
Downloads
データシート
ドキュメント
ドキュメント
User Manual L611T0006
L-611 Precision rotation stage for vacuum applications (1 E-7 hPa)
日付 / バージョン
2020-06-29
pdf - 303 KB
英語
ドキュメント
User Manual L611T0011
L-611 Precision rotation stage for vacuum applications (1 E-6 hPa), with stepper drive
日付 / バージョン
2020-06-29
pdf - 410 KB
英語
ドキュメント
User Manual L611T0007
L-611 Precision rotation stage for vacuum applications (1 E-9 hPa)
日付 / バージョン
2020-06-26
pdf - 392 KB
英語
３D モデル
３D モデル
L-611.991xxxVx 3D Model
日付 / バージョン
2023-03-30
zip - 10 MB
Quote / Order
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L-611.991300V7
Vacuum-compatible precision rotation stage; 2-phase stepper motor; 360 ° rotational angle; 100 N load capacity; 20 °/s maximum angular velocity; vacuum compatible to 10⁻⁷ hPa; 2 m cable length
L-611.991600V9
Vacuum-compatible precision rotation stage; 2-phase stepper motor; 360 ° rotational angle; 100 N load capacity; 20 °/s maximum angular velocity; vacuum compatible to 10⁻⁹ hPa; 2 m cable length
