Vacuum-compatible precision rotation stage; 2-phase stepper motor; 360 ° rotational angle; 100 N load capacity; 20 °/s maximum angular speed; vacuum compatible to 10 hPa
L-611 V6 • V7 • V9 Precision Rotation Stage Suitable for Vacuum
High Run-Out Accuracy
- Suitable for vacuum up to 10-9 hPa
- Unlimited travel range
- Very high resolution
- Stepper motor
- Direction-sensing reference switch
- Multi-axis setups possible
Reference-class rotation stage. High-precision positioning due to low-play preloaded worm gear. Preloaded pivot bearings for high run-out accuracy. Clear aperture with 35 mm Ø. Unlimited travel range in both directions of rotation. Reference switch.
Applications and use cases
Vacuum chambers
Research
Beamline instrumentation
Microscopy
Electronics assembly and inspection
Technology
Reduced outgassing especially for use in vacuum environments
In particular, the guide and the spindle are lubricated using a very low-outgassing substance. This allows a bakeout temperature of up to 80 °C. This and other modifications to the PI V6 vacuum class make it possible to use this positioner at up to 10-6 hPa.
Higher quality for high vacuum applications
In this case, special components suitable for high vacuum are used, such as motor, measuring system, and limit switches. In addition, the surface is made of uncoated aluminum and the spindles and guides are made of stainless steel. With this, the PI V7 vacuum class is reached, which means up to 10-7 hPa.
The highest quality for special requirements in ultrahigh vacuum
In this vacuum class, the product is optimized in all details thanks to components suitable for ultrahigh vacuum in order to reach PI V9 vacuum class up to 10-9 hPa. Among other things, only selected types of plastic are used for this purpose and bakeout temperatures of 120 °C with measuring system, respectively 150 °C without measuring system are applied.
Scope of delivery
Individual measurement logs available on request for wobble, axial, and radial creep. Please specify when ordering.
Specifications
Specifications
Drive properties | Tolerance | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 |
|---|---|---|---|---|
Drive type |
| 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor |
Operating voltage [V] |
| 24 | 24 | 24 |
Nominal voltage [V] |
| 24 | 24 | 24 |
Nominal current, RMS [A] | typ. | 1.2 | 1.2 | 1.2 |
Maximum power consumption [W] |
| 10 | 10 | 10 |
Motor resolution [full steps/rev.] |
| 200 | 200 | 200 |
Resistance phase-phase [Ω] | typ. | 3.3 | 3.3 | 3.3 |
Inductance phase-phase [mH] |
| 2.8 | 2.8 | 2.8 |
Mechanical properties | Tolerance | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 |
|---|---|---|---|---|
Permissible push force in X [N] | max. | 50 | 50 | 50 |
Permissible push force in Y [N] | max. | 50 | 50 | 50 |
Permissible push force in Z [N] | max. | 100 | 100 | 100 |
Permissible pull force in X [N] | max. | 50 | 50 | 50 |
Permissible pull force in Y [N] | max. | 50 | 50 | 50 |
Permissible pull force in Z [N] | max. | 100 | 100 | 100 |
Permissible torque in θX [Nm] | max. | 40 | 40 | 40 |
Permissible torque in θY [Nm] | max. | 40 | 40 | 40 |
Permissible torque in θZ [Nm] | max. | 3 | 3 | 3 |
Moment of inertia in θZ, unloaded [kg·mm2] | ±20 % | 770 | 770 | 770 |
Moved mass in θZ, unloaded [g] |
| 1100 | 1100 | 1100 |
Worm gear reduction |
| 90 : 1 | 90 : 1 | 90 : 1 |
Bearing type |
| Ball bearings | Ball bearings | Ball bearings |
Overall mass [g] |
| 2600 | 2600 | 2600 |
Material |
| Aluminum, anodized; stainless steel; red bronze | Aluminum, anodized; stainless steel; red bronze | Aluminum, anodized; stainless steel; red bronze |
Miscellaneous | L-611.991200V6 | L-611.991300V7 | L-611.991600V9 |
|---|---|---|---|
Operating temperature range [°C] | 5 to 40 | 5 to 40 | 5 to 40 |
Vacuum class [hPa] | 10-6 | 10-7 | 10-9 |
Connector | HD D-sub 26 (m) | D-sub 15 (f) | D-sub 15 (f) |
Cable length [m]1) | — | 2 | 2 |
Recommended controllers/drivers | C-663.12 C-885 with C-663.12C885 Modular ACS controller | C-663.12 C-885 with C-663.12C885 Modular ACS controller | C-663.12 C-885 with C-663.12C885 Modular ACS controller |
Fixed cable, firmly attached to the product
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
Downloads
データシート
ドキュメント
User Manual L611T0006
L-611 Precision rotation stage for vacuum applications (1 E-7 hPa)
User Manual L611T0011
L-611 Precision rotation stage for vacuum applications (1 E-6 hPa), with stepper drive
User Manual L611T0007
L-611 Precision rotation stage for vacuum applications (1 E-9 hPa)
3D モデル
L-611.991xxxVx 3D Model
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Vacuum-compatible precision rotation stage; 2-phase stepper motor; 360 ° rotational angle; 100 N load capacity; 20 °/s maximum angular speed; vacuum compatible to 10 hPa; 2 m cable length
Vacuum-compatible precision rotation stage; 2-phase stepper motor; 360 ° rotational angle; 100 N load capacity; 20 °/s maximum angular speed; vacuum compatible to 10 hPa; 2 m cable length
Accessories
Vacuum feedthrough, D-sub 15 (m/f), suitable for high vacuum (to 10-6 hPa)
Vacuum feedthrough, HD D-sub 26 (m/f), suitable for high vacuum (to 10-6 hPa)
Vacuum feedthrough, D-sub 9 (m/f), suitable for high vacuum (to 10-6 hPa)
Vacuum feedthrough, CF40 flange, 1 × D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF63 flange, 3 × D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF100 flange, 6 × D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF160 flange, 15 × D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF63 flange, 1 × D-sub 9 (m/m) and 1 x D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF100 flange, 3 × D-sub 9 (m/m) and 3 x D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF160 flange, 6 × D-sub 9 (m/m) and 6 x D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
AB-65 L mounting bracket, vacuum-compatible to 10-9 hPa
Mounting bracket for vertical mounting of positioners up to 100 mm in width and up to 300 mm in length; vacuum-compatible to 10-6 hPa
Mounting bracket for vertical mounting of positioners up to 100 mm in width and up to 300 mm in length; vacuum-compatible to 10-9 hPa


















