真空対応アイテムの製品シリーズ

PIは、高真空(HV)または超高真空(UHV)にすでに適した特定の製品シリーズの特定のカタログアイテムを提供しています。

さらに、ほとんどの多軸ソリューションは、真空での使用のために要求に応じて変更できます。真空設計についての更なる情報については>> 真空テクノロジーページ

ヘキサポッド

H-850.V Vacuum-Compatible 6-Axis Hexapod

For loads to 80 kg
  • Vaccum Version
  • Range ±50/±50/±25mm
  • Rotation range ±15/±15/±30°

H-811.I2V Vacuum-Compatible 6-Axis Miniature Hexapod

Fast, Compact, and Highly Precise
  • Vacuum version
  • Range ±17/±16/±6.5mm
  • Rotation range ±10/±10/±21°
  • MiM 0.2/0.2/0.08µm
  • Load capacity 5kg

H-824.V Vacuum-Compatible 6-Axis Hexapod

Compact and Precise
  • Vacuum version
  • Range ±22.5/±22.5/±12.5mm
  • Rotation range ±7.5/±7.5/±12.5°
  • Load capacity 5kg

直線、回転、昇降ステージおよびアクセサリ

RS-40 V7 Compact Rotation Stage Suitable for Vacuum

Precision Positioning

M-110 • M-111 • M-112 V6 Vacuum-Compatible Compact Linear Stage

XY(Z) Combinations with DC Gear Motor, Various Travel Range Variants
新製品

VT-80 V6 Linear Stage Suitable for Vacuum

Basic Version for Universal Fields of Use

L-611 V6 • V7 • V9 Precision Rotation Stage Suitable for Vacuum

High Travel Accuracy

L-509 V6 • V7 • V9 Vacuum-Compatible Precision Linear Stage

Compact Design, for Loads to 10 kg

L-310 V6 Precision Z Stage Suitable for Vacuum

Can be Compactly Combined with Linear and Rotation Stages
PI L-500

L-500 Adapter Bracket

For Vertical Mounting of Linear and Rotation Stages
Adapter Bracket
新製品

AB-65 Adapter Bracket

For Vertical Mounting of Linear and Rotation Stages
VFxx Vacuum Feedthroughs

C-815.VFxx Vacuum Feedthroughs

Interfaces Between Air Side and High Vacuum (HV) or Ultrahigh Vacuum (UHV)

L-220 V6 High-Resolution Linear Actuator Suitable for Vacuum

Suitable for High Cycle Numbers

ピエゾアクチュエータ ステージ

P-841 Preloaded Piezo Actuators

Compact Actuators for High Loads and Forces, with Position Sensor

P-733.3 XYZ Piezo Nanopositioner

High-Precision XYZ Scanner with Aperture

P-733.2 XY Piezo Nanopositioner

High-Precision XY Scanner with Aperture

P-216 PICA Power Piezo Actuators

Preloaded Piezo Actuators (HVPZT) with Sensor Option
  • Travel range to 180µm
  • Push force to 4500N
  • Pull force to 500N
  • Subnanometer resolution
  • For vacuum/ high temperature

P-620.Z - P-622.Z PIHera Vertical Precision Positioner

Variable Travel Ranges and Axis Configuration

P-845 Preloaded Piezo Actuators

For Very High Loads and Forces, with Position Sensor

P-844 Preloaded Piezo Actuators

For Very High Loads and Forces

P-840 Preloaded Piezo Actuators

Compact Actuators for High Loads and Forces

P-753 LISA Linear Actuator and Positioning Stage

Dynamic and Stable in Position

P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioner for up to 3 Axes

P-518 • P-528 Piezo Z/Tip/Tilt Stage

High Dynamics with Large Aperture

P-235 PICA Power Piezo Actuators

Preloaded High-Load Piezo Actuators (HVPZT) with Sensor Option
  • High Force
  • Travel range 180µm
  • Extremely high stiffness
  • Push force to 30000N
  • Pull force to 3500N

N-480 High-Precision Kinematic Mirror Mount

With N-470 PiezoMike Linear Actuators

N-470.V PiezoMike Linear Actuator

Minimum Dimensions, High Forces, Stable Positioning, Vacuum to 10-6 hPa

P-620.2 – P-629.2 PIHera XY Piezo Stage

High-precision XY Nanopositioners with Variable Travel Ranges

P-620.1 • P-629.1 PIHera Linear Precision Positioner

Variable Travel Ranges and Axis Configuration

センサ

D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors
  • Highest precision
  • Resolution to 0.01nm
  • Linearity error to 0,01%
  • Measuring range to 300µm